D07-9 Mass Flow Controller/Flow Meter

NegotiableUpdate on 02/09

Model

Nature of the Manufacturer: Producers

Product Category

Place of Origin

Online Consult

Overview

The D07-9 mass flow controller/flowmeter is a thermal mass flow meter. The mass flow controller can be applied to measure and control various gases, and in addition to measurement, it can also precisely control the mass flow rate of gases. The mass flow meter (MFM) can accurately measure the mass flow rate of gases. The D07-9 product is a simulation product developed by Huacheng Electronics with high precision and fast response time.

Product Details

Mass Flow Meter (MFM) is used for precise measurement of gas mass flow rate; Mass Flow Controller (MFC) is used for precise measurement and control of gas mass flow. They have important applications in scientific research and production in various fields such as semiconductor and integrated circuit industry, special materials discipline, chemical industry, petroleum industry, medicine, environmental protection, and vacuum. Its typical application scenarios include electronic process equipment such as diffusion, oxidation, epitaxy CVD、 Plasma etching, sputtering, ion implantation; And coating equipment, fiber optic melting, microreactor device, mixed gas distribution system, capillary measurement, gas chromatograph and other analytical instruments.

D07-9 Mass Flow Controller/Flow MeterIt has the characteristics of high precision, good repeatability, fast response speed, soft start, stable and reliable, and wide working pressure range (can work under high pressure or vacuum conditions). It adopts international standard joints, which are easy to operate and use, can be installed at any position, and is easy to connect with computers for automatic control.

The D07 series mass flow controller and mass flow meter are generally used in conjunction with the D08 series flow display instrument and other products, with dedicated cables connecting the control controller and display.

feature

• Medium flow type
MFC with rubber seal and analog circuit
The splitter is not easily blocked
Adopting DB15 type electrical plug and international standard mechanical connector

D07-9 Mass Flow Controller/Flow MeterTechnical Specifications

type	D07-9E type	D07-9EM type	D07-9F type	D07-9FM 型
Flow specifications	( 0~20,30,50,100,150,200,250) SLM	( 0~20,30,50,100,150,200,250) SLM	0~20,30,50,100,150,200,250 SLM	0~20,30,50,100,150,200,250 SLM
accuracy	±2 % F. S.	±2 % F. S.	±2% F. S.	±2 % F. S.
Linear	±1 % F. S.	±1 % F. S.	±1% F. S.	±1 % F. S.
repeatability accuracy	±0.2 % F. S.	±0.2 % F. S.	±0.2% F. S.	±0.2 % F. S.
response time	(1 ~ 4) sec	(1 ~ 4) sec	≤ 4sec	≤4 sec
Range of working pressure difference	20 , 30 SLM: (0.05 ~ 0.30) MPa （7.3~43.5 psid） 50,150 SLM: (0.10 ~ 0.30) MPa （14.5~43.5 psid） 200,250 SLM: (0.15 ~ 0.30) MPa （21.8~43.5 psid）	-	20,30 SLM: (0.05~0.30) MPa (7.3~43.5 psid) 50~150 SLM: (0.10~0.30) MPa (14.5~43.5 psid) 200,250 SLM: (0.15~0.30) MPa (21.8~43.5 psid)	-
Air pressure drop	-	20~100SLM: <0.02 MPa （2.9 psid）; >100SLM: <0.05 MPa （7.3 psid）	-	20~100SLM: <0.02 MPa (2.9 psid); >100SLM: <0.05 MPa (7.3 psid)
Maximum work pressure	1 MPa	1 MPa	1 MPa	1 MPa
pressure resistance	3 MPa （435.1 psig）	3 MPa （435.1 psig）	3 MPa (435.1 psig)	3 MPa (435.1 psig)
Working environment temperature	5 ℃ ~ 45 ℃	5 ℃ ~ 45 ℃	5℃ ~ 45℃	5 ℃ ~ 45 ℃
Input/output signals	0 V ~ +5.00 V (Input impedance greater than 100K, output current not greater than 3mA)	0 V ~ +5.00 V (Input impedance greater than 100K, output current not greater than 3mA)	4~20 mA or 1~5 VDC	4~20 mA or 1~5 VDC
power supply	+15 V 50 mA -15V 400 mA	+15 V 50 mA -15 V 50 mA	24VDC 400 mA	24 VDC 100 mA
weight	2.6 kg	1.5 kg	2.6 kg	1.5 kg