D07-7 Mass Flow Controller/Flow Meter

NegotiableUpdate on 02/09

Model

Nature of the Manufacturer: Producers

Product Category

Place of Origin

Online Consult

Overview

The D07-7 mass flow controller/flowmeter is a thermal mass flow meter. The mass flow controller can be applied to measure and control various gases, and in addition to measurement, it can also precisely control the mass flow rate of gases. The mass flow meter (MFM) can accurately measure the mass flow rate of gases. The D07-7 product is a basic product of the Seven Star flowmeter, which can meet the basic needs of customers for flow measurement and control.

Product Details

Mass Flow Controller (MFC) is used for precise measurement and control of gas mass flow. They have important applications in scientific research and production in various fields such as semiconductor and integrated circuit industry, special materials discipline, chemical industry, petroleum industry, medicine, environmental protection, and vacuum. Its typical application scenarios include electronic process equipment such as diffusion, oxidation, epitaxy CVD、 Plasma etching, sputtering, ion implantation; And coating equipment, fiber optic melting, microreactor device, mixed gas distribution system, capillary measurement, gas chromatograph and other analytical instruments.

D07-7 Mass Flow Controller/Flow MeterIt has the characteristics of high precision, good repeatability, fast response speed, soft start, stable and reliable, and wide working pressure range (can work under high pressure or vacuum conditions). It is easy to operate and use, can be installed at any position, and is convenient to connect with a computer for automatic control. The D07 series quality flow controller is generally used in conjunction with D08 series flow display devices and other products, and is connected to the display device with a dedicated cable.

Features:

MFC with rubber seal and analog circuit

• Tubular diversion, long service life

D07-7 Mass Flow Controller/Flow MeterTechnical Specifications:

serial number	type	D07-7K 型	D07-7B type	D07-7C type	D07-7CM type
1	Flow specifications	(20,30,50,100,200,300,500) SCCM ( 0~1,2,3,5,10) SLM	(0~5,10,20,30,50,100,200,300,500) SCCM ( 0~1,2,3,5,10) SLM	( 0~5,10,20,30,50,100,200,300,500) SCCM ( 0~1,2,3,5,10) SLM	( 0~5,10,20,30,50,100,200,300,500) SCCM ( 0~1,2,3,5,10) SLM
2	accuracy	±1 % F.S	±1.5 % F.S	±1.5 % F.S	±1.5 % F.S
3	linear	±1 % F.S	±1 % F.S	±1 % F.S	±1 % F.S
4	repeatability accuracy	±0.2 %F.S	±0.2 %F.S	±0.2 %F.S	±0.2 %F.S
5	response time	Electrical characteristics: 10 seconds; Gas characteristics: ≤ 4 seconds	Electrical characteristics: 10 seconds; Gas characteristics: ≤ 4 seconds	Electrical characteristics: 10 seconds; Gas characteristics: ≤ 4 seconds	10 sec
6	Air pressure drop	ˉ	ˉ	ˉ	<0.01 MPa
7	Range of working pressure difference	(0.1 ~ 0.5) MPa	(0.1 ~ 0.5) MPa	(0.1 ~ 0.5) MPa	<0.01 MPa
8	temperature coefficient	Zero:≤±0.1% F.S./℃; Span: ≤±0.2% F.S./℃;	ˉ	ˉ	ˉ
9	Maximum work pressure	1 MPa	1 MPa	1 MPa	1 MPa
10	pressure resistance	3 MPa	3 MPa	3 MPa	3 MPa
11	Working environment temperature	5 ℃ ~ 45 ℃	5 ℃ ~ 45 ℃	5 ℃ ~ 45 ℃	5 ℃ ~ 45 ℃
12	Input/output signals	0 V ~ +5.00 V (Input impedance greater than 100K, output current not greater than 3mA)	0 V ~ +5.00 V (Input impedance greater than 100K, output current not greater than 3mA)	0 V ~ +5.00 V (Input impedance greater than 100K, output current not greater than 3mA)	0 V ~ +5.00 V (Input impedance greater than 100K, output current not greater than 3mA)
13	power supply	+15 V 50 mA; -15V 200 mA	+15 V 50 mA; -15V 200 mA	+15 V 50 mA; -15V 200 mA	+15 V 50 mA -15 V 50 mA
14	weight	1.1 kg	1.1 kg	1.1 kg	0.92 kg