-
E-mail
mfcsales@sevenstar.com.cn
- Phone
-
Address
No. 8 Wenchang Avenue, Beijing Economic and Technological Development Zone (Postal Code: 100176)
Product Categories
Beijing Qixing Huachuang Flow Meter Co., Ltd
CS300 Mass Flow Controller&Flow Meter
NegotiableUpdate on 04/22
- Model
- Nature of the Manufacturer
- Producers
- Product Category
- Place of Origin
Overview
The CS300 gas mass flow controller is a product designed specifically for large-scale integrated circuit equipment using the Seven Star flowmeter. The product adopts a pressure signal compensation algorithm based on DF on the original CS200 gas mass flow, and a new metal surface treatment process based on the full controller. All technical indicators of the product strictly follow SEM standards and support VI and C-type GS gas path systems.
Product Details
advantage
The accuracy adopts set point precision, and the product accuracy can reach ± 1.0% S.P., with the fastest response time ≤ 0.5sec.
The CS300 series products can be equipped with pressure compensation function to effectively compensate for the disturbance of gas pressure in the front section, reduce the impact of pressure changes on instantaneous flow rate, and ensure the stability and accuracy of product operation.
The principle of using a constant power sensor compensates for temperature changes, fundamentally suppressing the zero drift phenomenon of the flowmeter and ensuring the linearity of the sensor.
High end products use specialized metal surface treatment technology, and all metal materials in contact with gas are made of 316LVV. The CS300C product has a metal surface roughness of less than 5RA and is strictly manufactured according to SEMI standards.
Technical Parameter
|
CS300 |
||||||||
|
model |
CS310C |
CS320C |
CS310D |
CS320D |
||||
|
Valve type |
Normally Open or Normally Closed |
not have |
Normally Open or Normally Closed |
not have |
Normally Open or Normally Closed |
not have |
Normally Open or Normally Closed |
not have |
|
Flow specification (N2) |
(0～1,2,3,5,10,20,30,50,100,200,300,500) SCCM |
|||||||
|
accuracy |
|
|||||||
|
linear |
±0.5% F.S. |
|||||||
|
repeatability |
±0.2% F.S. |
|||||||
|
response time |
≤ 0.8sec （≤ 0.5sec optional） |
|||||||
|
Range of working pressure difference |
0.05-0.35MPa flow specification ≤ 10SLM |
＜0.02 MPa |
0.05-0.35MPa flow specification ≤ 10SLM |
＜0.02 MPa |
0.05-0.35MPa flow specification ≤ 10SLM |
＜0.02 MPa |
0.05-0.35MPa flow specification ≤ 10SLM |
＜0.02 MPa |
|
temperature coefficient |
Zero point: ≤ ±0.02% F.S./℃； During adjustment: ≤ ±0.05% F.S./℃ |
|||||||
|
pressure resistance |
3.5 MPa |
|||||||
|
Leakage rate |
1×10-11Pa·m3/ sec He |
|||||||
|
Sealing material |
metal seal |
|||||||
|
Maximum working pressure |
0.45MPa |
|||||||
|
Ambient Temperature |
（0～50）℃ |
|||||||
|
Input signal |
Number: RS485 or DeviceNet |
not have |
Number: RS485 or DeviceNet |
not have |
Number: RS485 or DeviceNet |
not have |
Number: RS485 or DeviceNet |
not have |
|
output signal |
Number: RS485 or DeviceNet |
|||||||
|
drift |
＜ 0.6% F.S./year without zero point correction |
|||||||
|
power supply |
± 8 to ± 16 VDC (bipolar) or+14 to+28 VDC (unipolar) |
|||||||
|
surface chemical composition |
Cr/Fe ratio ≥ 2.0; CrO thickness ≥ 20 (angstroms) |
- |
||||||
|
Surface roughness |
Ra 5μinch |
|||||||
|
Standard joint form |
VCR1/4 male connector; |
1.5 "B-type sealing joint |
VCR1/4 male connector; |
1.5 "B-type sealing joint |
||||
|
Form of power connector |
D-type 9-pin male connector; D-type 15 pin male connector; DeviceNet connector |
|||||||
|
weight |
1 Kg |
0.8Kg |
1.2Kg |
1Kg |
1 Kg |
0.8Kg |
1.2Kg |
1Kg |
Scan the QR code and use your phone to check
