CS200H Mass Flow Controller&Flow Meter

NegotiableUpdate on 04/22

Model

Nature of the Manufacturer: Producers

Product Category

Place of Origin

Online Consult

Overview

CS200H gas mass flow control is a digital high-temperature product produced by Seven Star flowmeter. Its electrical and mechanical parts adopt a separate design, connected by high-temperature cables, which can work in high-temperature environments and meet the complex and varied semiconductor measurement needs.

Product Details

advantage

Controller operating temperature: 90-120 ℃.
High control accuracy: The product accuracy can reach ± 1.0% S.P. (≥ 35% F.S.).
Quick response, response time ≤ 0.8sec.
Adopting the principle of constant power sensor, corresponding compensation is made when the temperature changes, fundamentally suppressing the zero drift phenomenon of the flowmeter and ensuring the linearity of the sensor.
High end products use specialized metal surface treatment technology, and all surface metal materials in contact with gas are made of 316LVV. The CS200 product has a metal surface roughness of up to 10RA or less, and is manufactured strictly in accordance with SEMI standards.
• Supports dual power supply of ± 8V~± 16V+ 14V~+28V single power supply; Digital, analog input/output.
The product size complies with the internationally recognized SEMI standard, RS485, and DeviceNet communication method.

Technical Parameter

CS200
model	CS200-H
Valve type	normally closed	not have
Flow specification (N2)	(0～2,3,5,10,20,30,50,100,200,300,500) SCCM (0～1,2,3,5,10,20,30) SLM
accuracy	±1.0% S.P. (≥35% F.S.) ±0.35% F. S.(＜35% F.S.)
linear	±0.5% F.S.
repeatability	±0.2% F.S.
response time	≤ 1sec
Range of working pressure difference	0.05-0.35MPa flow specification ≤ 10SLM 0.1-0.35MPa flow specification>10SLM	＜0.02 MPa
Maximum working pressure	0.45MPa
temperature coefficient	Zero point: ≤ ±0.1% F.S./℃； During adjustment: ≤ ±0.1% F.S./℃
compressive strength	3MPa
Leakage rate	1×10^-11Pa·m³/ sec He
Sealing material	metal seal
Ambient Temperature	Mass flow controller/flowmeter: (90-120) ℃; Control box: (0-50) ℃
Input signal	Number: RS485 or DeviceNet Simulation: (0-5) VDC or (4-20) mA	not have
output signal	Number: RS485 or DeviceNet Simulation: (0-5) VDC or (4-20) mA
drift	＜ 0.6% F.S./year without zero point correction
power supply	± 8 to ± 16 VDC (bipolar) or+14 to+28 VDC (unipolar)
surface chemical composition	Cr/Fe ratio ≥ 2.0, CrO thickness ≥ 20 (angstroms)
Surface roughness	10 Ra
Standard joint form	Double card sleeve with a diameter of 6; Double card sleeve 1/4; VCR1/4 male connector; 1.5 ´ C-type sealing joint 1.5 ´ W type sealing joint
Form of power connector	D-type 9-pin male connector; D-type 15 pin male connector; DeviceNet connector
Connect high-temperature cables	2m
weight	1.2Kg	1Kg

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