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Shanghai MaFu Furnace Technology Instrument Co., Ltd
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Shanghai MaFu Furnace Technology Instrument Co., Ltd

  • E-mail

    mflkj_wu@qq.com

  • Phone

    18918409255

  • Address

    Zhongchuang Road, Songjiang District, Shanghai (199 Park)

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1400 ℃ vacuum atmosphere furnace with a volume of 36 liters

NegotiableUpdate on 01/27
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Overview
The MFLZQ-14 series is an ideal product for high-temperature gas sintering, atmosphere reduction, CVD experiments, and vacuum annealing in universities, research institutes, and industrial and mining enterprises. It is a vacuum atmosphere sintering furnace with a maximum temperature of 1400 degrees Celsius and a vacuum atmosphere sintering furnace. It is specifically designed for sintering materials in a vacuum state with a certain atmosphere (such as inert gas) environment. It is an ideal experimental and production equipment for industrial and mining enterprises.
Product Details

1Product description

This vacuum high-temperature atmosphere furnace ensures that the oxygen content in the furnace is minimized by pre vacuuming. Then nitrogen, argon, or a mixture of nitrogen and hydrogen are introduced to achieve the desired heat treatment effect under atmospheric protection. Due to its excellent atmosphere and compact practicality, it has been widely used in material laboratories or small batch production of products such as semiconductors and silicon nitride



IIProduct Features

  • 1. Integrated design optimizes furnace structure, saving space

  • 2. The furnace material is made of alumina polycrystalline fiber material, which is not easily deformed at high temperatures and has excellent insulation performance

  • 3. Double layered shell structure, equipped with air cooling system, with shell temperature at room temperature+10 ℃

  • 4. Intelligent PID control instrument, 30 segment programmable program, capable of curve heating and setting temperature rate, constant temperature time control, automatic shutdown, etc

  • 5. High temperature control accuracy, with an accuracy of ± 0.1 ℃ within 1000 degrees; Over 1000 degrees ± 1 ℃

  • 6. Equipped with door opening, power-off, over temperature alarm, leakage protection, over temperature protection

  • 7. Optional large screen paperless recorder can be equipped to achieve real-time recording of temperature rise curves, and comes with a storage card for analyzing and printing experimental data


Technical Specifications:

Device Model MFLZQ433-14
performance Temperature control range Room temperature -1400 ℃
Operating Temperature ≤1300℃
furnace size 400 * 300 * 300mm (D * W * H), volume: 36 liters
temperature control accuracy <1000 ±0.1℃ ; ≥1000±1℃
Constant temperature fluctuation ± 1 ℃ (testing point at 1000 ℃)
heating rate Recommended temperature below 1000 degrees ≤ 10 ℃/min, with the fastest heating rate ≤ 30 ℃/min
Cooling rate natural cooling
Furnace temperature The surface temperature of the furnace body is less than room temperature+10 (measured at 1000 ℃)
Vacuum degree of cold state furnace -0.1Mpa
constitute Exterior High quality steel plate spray treatment, beautiful and corrosion-resistant.
furnace body Aluminum oxide polycrystalline fiber insulated furnace, sealed chamber adopts 304 stainless steel argon arc welding sealing welding.
sensor 1400 type S-type thermocouple
heating element High quality silicon carbide rod
Cooling treatment Water cooling is installed at the furnace door and top of the furnace. Ensure the sealing effect of the sealing ring.
Furnace structure Double layered shell structure with air cooling system
controller Control method PID controlmanufacture
Set representation Digital setting/digital display
overtemperature protection Integrated controller
overtemperature setting Number setting
Operation function Customized Run/Program Run (30 segment program temperature control)
Additional features Deviation correction, power outage compensation, lock key function
timer 1 minute -99 hours 59 minutes and 999 hours 50 minutes digital setting, automatic operation, fast automatic stop
safety working environment RT±5-40℃
Usage guarantee Explosion proof automatic pressure relief protection, power failure when opening the door, over temperature alarm, leakage protection, over temperature protection
vacuum system vacuum pump

1. Mechanical pump

2. Ultimate vacuum degree of vacuum pump: 10-1 times pa

3. Pumping speed: 1 liter per second

flow meter Float flowmeter
pressure gauge Japanese SMC digital vacuum gauge
water cooling system chiller

GW3000 chiller (using water cooling setting, double-sided water cooling treatment for sealed furnace door)

Specifications Overall dimensions 1100*1510*1410mm(D*W*H)
weight 800kg
power supply voltage 380V50HZ
input power 12KW








Other standard sizes of MFLZQ-14 series:

Device Model Furnace size (depth * width * height) Reachable temperature long-term use voltage power thermocouple heating element
MFLZQ151-14 150*100*100 1400℃ 1300℃ 220V50HZ 2KW S-type silicon carbide rod
MFLZQ215-14 200*150*150 1400℃ 1300℃ 220V50HZ 2.5KW S-type silicon carbide rod
MFLZQ322-14 300*200*200 1400℃ 1300℃ 220V50HZ 5KW S-type silicon carbide rod
MFLZQ325-14 300*250*250 1400℃ 1300℃ 220V50HZ 5KW S-type silicon carbide rod
MFLZQ433-14 400*300*300 1400℃ 1300℃ 380V50HZ 12KW S-type silicon carbide rod
MFLZQ544-14 500*400*400 1400℃ 1300℃ 380V50HZ 16KW S-type silicon carbide rod
MFLZQ655-14 600*500*500 1400℃ 1300℃ 380V50HZ 45KW S-type silicon carbide rod
MFLZQ766-14 700*600*600 1400℃ 1300℃ 380V50HZ 60KW S-type silicon carbide rod
MFLZQ877-14 800*700*700 1400℃ 1300℃ 380V50HZ 80KW S-type silicon carbide rod
MFLZQ988-14 900*800*800 1400℃ 1300℃ 380V50HZ 130KW S-type silicon carbide rod


For other sizes, please contact customer service


Please note
The heating rate is measured under no-load operation with a temperature set at 100 ° C below the maximum temperature.
The insulation power is measured under continuous working conditions.
The external dimensions are measured when closing the furnace door, including the size of the chimney.
The volume of the uniform temperature zone is less than the total volume of the furnace.

The content may be modified or corrected

Standard equipment list:



name quantity
Atmosphere Furnace a
High temperature gloves a pair of
Crucible pliers a handful
Corundum board cushion brick a piece of
Mechanical vacuum pump a
GW3000 chiller a
Equipment Manual a copy
Instrument manual a copy
Warranty Card a copy



1、 After sales service

*One year warranty, lifetime technical support. (Special note: Consumables such as heating elements, sample crucibles, etc. are not covered by warranty. Damage caused by the use of corrosive gases is not covered by warranty.)


2、 Precautions

1. For safety reasons, please place the stove in a well ventilated area.

2. To improve the service life of the furnace, it is recommended that the heating rate not exceed 10 ℃/min. The cooling rate shall not exceed 5 ℃/min.

3. This furnace has no vacuum sealing and toxic or explosive gases are prohibited from being introduced

4. Do not place materials directly on the furnace bottom cushion bricks. Please place the materials in a dedicated crucible.

5. When heating, do not let the material and crucible touch the heating element and thermocouple