1. Introduction

In the field of modern vacuum technology, molecular pump groups are widely used in various industries such as semiconductor manufacturing, material research, surface analysis, optoelectronic device preparation, vacuum coating, etc. due to their ability to achieve high vacuum and even ultra-high vacuum environments. This article combines the specific parameters of a certain model of molecular pump group (such as one key start control mode, TURBOVAC 90i molecular pump, maximum vacuum degree of 10 ⁻⁸ Pa, system leakage rate of 1 × 10 ⁻¹⁰ Pa · m ³/s, etc.), and conducts in-depth analysis from three dimensions: technical characteristics, typical application scenarios, and use cases.

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2、 Technical characteristics of molecular pump group

The molecular pump assembly has high-performance vacuum pumping capability, and the main technical parameters are as follows:

• Control mode: One click start, easy to operate, reduces the threshold for use

• Molecular pump: TURBOVAC 90i, pumping speed of 90 L/s, suitable for high vacuum requirements

• Front stage pump: Bipolar rotary vane oil pump (optional 1.2 m ³/h floating vortex dry pump)

• Front stage pumping speed: 2 m ³/h

• Composite vacuum gauge: PTR90 (measuring range from atmosphere to 5 × 10 ⁻⁷ Pa)

• Ultimate vacuum degree: 10 ⁻⁸ Pa

• Interface specification: KF40 (optional KF25, KF16)

• Cooling method: air-cooled, suitable for various laboratory environments

• System leakage rate: 1 × 10 ⁻¹⁰ Pa · m ³/s, outstanding stability and sealing performance

• Power supply: 220V 50Hz

• Volume and weight: 400 × 340 × 260 mm, 18kg, with good portability

These characteristics make it an ideal choice for supporting scientific research, industry, and high vacuum equipment.

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3、 The main application scenarios of molecular pump groups

1. Semiconductor and Microelectronics Manufacturing

Semiconductor processes, such as deposition (PVD, CVD), ion etching, surface cleaning, etc., require a high vacuum environment to avoid particle contamination and chemical reaction interference.
The molecular pump group, with a maximum vacuum degree of 10 ⁻⁸ Pa, can provide reliable front-end vacuum conditions for photolithography, thin film deposition, and wafer processing.

Use case:
A certain wafer fab uses this molecular pump group in the photoresist removal process, which is used in conjunction with a contact cleaning chamber to improve process efficiency and enhance wafer surface cleanliness through rapid evacuation.

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2. Materials Science and Surface Analysis (XPS, AES, SIMS)

Surface analysis technology has high requirements for vacuum degree. If there is too much residual gas in the cavity, it will affect the electron spectrum, ion signal, and detection sensitivity.

The characteristics of this molecular pump group are:

• High pumping speed (90L/s)

• Ultra low leakage rate (1 × 10 ⁻¹⁰ Pa · m ³/s)

• The ultimate vacuum can reach 10 ⁻⁸ Pa

Very suitable as an independent vacuum source or matching pump set for material research equipment.

Use case:
The School of Materials Science and Technology at a certain university uses this molecular pump set as a backup vacuum system for XPS (X-ray photoelectron spectroscopy) to assist in vacuuming during instrument maintenance, ensuring the stability and repeatability of analysis results.

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3. Development of optoelectronic devices (OLED, laser, photodetector)

The preparation process of optoelectronic thin films involves multiple sensitive materials and requires low oxygen and low water pollution environment.

The molecular pump assembly:

• Air cooled design, durable and stable

• Small size, easy to integrate with the vapor deposition chamber

• KF40 interface has strong adaptability

Especially suitable for laboratory level vapor deposition equipment and prototype development lines.

Use case:
When developing a new type of infrared detector, a research institution used the molecular pump set to match the evaporation chamber, ensuring that the vacuum in the chamber was maintained at the level of 10 ⁻⁷ Pa during thin film deposition, thereby improving the device's mass production yield.

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4. Vacuum coating equipment (hard coating, optical coating)

During the coating process, if there is too much gas in the chamber, it can cause problems such as reduced adhesion and severe oxidation of the film layer.

The molecular pump group relies on:

• High pumping speed

• Stable air cooling

• Quickly start the front-end pump
  It can significantly shorten the vacuum evacuation time and improve the coating efficiency.

Use case:
A certain optical coating factory uses a molecular pump group for the bottom pumping process of coating mirrors, which shortens the pumping time by 30% compared to the original system and improves the overall efficiency of the production line by 15%.

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5. General high vacuum system for scientific research laboratories

Suitable for:

• Mass spectrometer (MS)

• vacuum furnace

• Ion beam sputtering

• Plasma experimental apparatus

• Low temperature experimental sample chamber

Its one click start function and stable vacuum performance make it very suitable for various interdisciplinary research.

Use case:
The physics laboratory uses this molecular pump assembly to build an independent testing chamber for material electrical measurements in low-temperature environments (LHe). Its high stability ensures the vacuum reliability of long-term experiments.

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4、 Summary of Typical Use Cases

Through these cases, we can see that the molecular pump group is particularly suitable for integration into scientific research equipment, semiconductor process modules, optoelectronic vapor deposition systems, and other applications due to its small size, high pumping speed, simple operation, and stable vacuum. Whether it is an industrial production line or a research laboratory, it can provide reliable guarantees for experiments and production with stable vacuum capabilities.

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5、 Conclusion

As the core component of high vacuum systems, the performance of molecular pump units directly affects the stability and testing accuracy of the equipment. With the TURBOVAC 90i molecular pump, high stability front-end pump, ultra-low leakage sealing structure, and one key start control method, this model of molecular pump assembly combines ease of use, portability, and professionalism, and can be widely used in fields such as semiconductor, materials science, optoelectronic devices, vacuum coating, and scientific research experiments.

It not only improves the operational efficiency of high vacuum systems, but also provides a solid foundation for scientific research and industrial innovation.