Qingdao Xinsheng has recently launched multiple gas mass flow meters and mass flow controllers, successfully integrating the core technology of the entire chain from MEMS chips to flow detection instruments and algorithms, becoming one of the few high-tech enterprises in Qingdao that master MEMS core chip technology.

With the increasing attention and support from the government for domestically produced instruments and semiconductor equipment, the domestic analytical instrument industry and semiconductor equipment industry have achieved rapid development. As the core components of analytical instruments and semiconductor equipment, gas mass flow meters/controllers are still mainly imported, and there is an urgent need for domestic substitution. Unlike traditional volumetric flow meters based on differential pressure and vortex street principles, MEMS gas mass flow meters use the principle of thermal conduction to measure gas mass flow with high precision. This type of product is not affected by environmental parameters such as temperature and pressure.

Qingdao Xinsheng S500 series gas mass flow controllerThe gas flow channel design with * can achieve flexible split ratio configuration, covering a range of 1sccm~120slm, with a minimum control accuracy of 0.1sccm, and a drift of only 0.4~0.6% in the temperature range of 0~50 ℃. In terms of electrical signals, we provide multiple digital and analog control methods, and are equipped with industrial grade display screens for easy on-site debugging and configuration by customers.