This article introduces the analysis method of using Perkin Elmer Avio 200 inductively coupled plasma optical emission spectrometer (ICP-OES) to determine various impurity elements in high-purity quartz sand samples, and systematically validates the method. The results indicate that the method has excellent accuracy and precision, and the result values of both samples meet the limit requirements for 13 impurity elements in the "GB/T 32649-2016 High Purity Quartz Sand for Photovoltaic Use" standard, thus achieving accurate determination of trace elements in high-purity quartz sand samples.