Phenomenon: The probe cannot accurately contact the testing points of the wafer or chip, resulting in abnormal test data.

1. Mechanical structure inspection (5 minutes)

X/Y/Z axis looseness:

Check if the locking screws of the probe table or probe arm are loose.

After tightening the screws, use a dial gauge to test the repeat positioning accuracy of the table.

Rail jamming:

Clean the guide rail and apply a small amount of lubricating grease.

Manually push the tabletop and check for any jamming or abnormal noise.

2. Optical system calibration (10 minutes)

Microscope focusing offset:

Adjust the height of the microscope objective to ensure clear imaging of the wafer surface.

Verify the focusing accuracy using calibration plates (such as metal grids with a line width of 10 μ m).

CCD camera offset:

Run the "Camera Calibration" function in the software to recalibrate the probe and imaging coordinate system.

Check if the camera connection cable is loose.

3. Software parameter reset (5 minutes)

Coordinate system disorder:

Click "Reset Coordinate System" in the control software to redefine the origin.

Check if the "probe compensation value" in the software has been mistakenly modified.

Motion control card malfunction:

Restart the motion control card (turn off the power and wait for 1 minute before turning it back on).

Update firmware to the latest version.

2、 Poor Contact: Rapid Diagnosis and Repair

Phenomenon: The contact between the probe and the test point is unstable, causing fluctuations in resistance values or open circuits.

1. Probe status check (5 minutes)

Probe wear:

Observe the probe tip under a microscope to check for any bending, oxidation, or wear.

Replace worn probes (such as probes made of tungsten steel or beryllium copper).

Probe card deformation:

Check if the probe card is bent. If the deformation exceeds 0.1mm, it needs to be replaced.

Clean the probe card.

2. Contact pressure adjustment (10 minutes)

Excessive/insufficient pressure:

Use a pressure tester to measure the probe contact force, with a standard value of 2-5g.

Adjust the tension of the probe arm spring (clockwise rotation increases pressure, counterclockwise decrease).

Uneven countertop:

Use a spirit level to check if the tabletop is level.

Adjust the support screws below the tabletop.

3. Environmental interference elimination (5 minutes)

Electrostatic effects:

Check if the grounding wire is well connected.

Use an ion fan to neutralize static electricity.

Vibration interference:

Move the probe station to a vibration free area.

Place anti vibration pads under the countertop.

3、 Imaging Blur: Rapid Optimization and Repair

Phenomenon: The imaging of the microscope or camera is not clear, which affects the positioning accuracy of the probe.

1. Cleaning of optical components (5 minutes)

Objective lens contamination:

Blow off the dust on the surface of the objective lens with a balloon, and then wipe it with a cotton swab dipped in a small amount of optical cleaning solution.

Check if the objective lens is loose.

Light source attenuation:

Adjust the brightness of the light source and replace the aging light bulb.

Check if the light source connection wire is loose.

2. Imaging parameter adjustment (10 minutes)

Inaccurate focusing:

Manually rotate the microscope focus knob until the image is at its clearest.

Enable the 'autofocus' function in the software.

Insufficient contrast:

Adjust the camera gain and exposure time.

Use polarizing film to reduce reflection.

3. Software and hardware collaboration (5 minutes)

Image processing card malfunction:

Restart the image processing card (turn off the power and wait for 1 minute before restarting).

Update the driver program to the latest version.

Camera resolution mismatch:

Set the camera resolution in the software to match the hardware parameters.

Check if the camera frame rate is too low.

4、 Comprehensive inspection and prevention

1. Daily maintenance checklist

Clean the surface of the probe station (wipe with a dust-free cloth).

Check the status of the probe (observe the needle tip with a microscope).

Run the self-test program.

2. Common fault prevention

Probe wear: Replace the probe every 5000 tests.

Poor contact: Regularly clean the probe card (once a month).

Imaging blur: Calibrate the optical system (including objective lens and camera) quarterly.

3. Emergency situation handling

Probe breakage: Stop testing immediately, remove the broken probe with tweezers, and replace it with a new probe.

Desktop jamming: Turn off the power and manually release the rail locking device (such as the emergency release button on the side).

Software crash: Force restart the computer (hold down the power button for 5 seconds) to restore backup configuration files.

Summary: By step-by-step troubleshooting of mechanical, electrical, optical, and software issues, the problems of probe station misalignment, poor contact, and blurred imaging can be resolved within 30 minutes. Regular maintenance and preventive inspections can significantly reduce the failure rate and ensure testing stability.