Chip interconnect 3D laser direct writing equipmentThrough Multi Photon Aggregation (MPP) technology, true 3D machining of sub micron level free-form surface structures is achieved, providing an important manufacturing platform for the hybrid integration of silicon optical chips, lithium niobate photonic circuits, and quantum optical devices.
Key Features:
Ultra high speed processing module greatly improves processing efficiency
High precision 3D machining, designing and processing complex structures with arbitrary free-form surfaces
Confocal and fluorescence detection system for high-precision position recognition and alignment
Nano precision automatic 3D alignment and positioning system
Real time high-definition microscopy imaging and measurement, processing and inspection global coordinate system
Laser energy stabilization system ensures long-term processing consistency
Vacuum adsorption sample stage, suitable for various substrate materials
Specialized fixtures for optical fibers, fiber arrays, and photonic chips
Automatic laser power compensation to eliminate the influence of end face machining defects
Automatic substrate tilt detection and leveling
Visual programming, custom machining process
Maintenance cycle of key components:
Femtosecond laser: output power stability testing, monthly, power meter calibration;
Mirror system: scanning range and secondary calibration, calibrated every six months, 140 × 140 μ m ²;
Temperature control system: Sensor blackbody radiation source calibration, quarterly, ± 0.1 ℃ accuracy;
Refrigeration module: refrigerant pressure and pipeline sealing inspection, weekly (liquid nitrogen), pressure gauge reading.
Daily maintenance process:
Optical system cleaning:
Use a dust-free cloth dipped in anhydrous ethanol to wipe the protective mirror, vibrating mirror, and laser window to avoid scratching the coating layer.
When replacing the protective mirror, the nozzle should be sealed to prevent dust from entering the optical system.
Sports platform calibration:
Quarterly inspection of the repeatability accuracy (± 10nm) of the three-dimensional piezoelectric ceramic table, verified through standard calibration plates.
Special nano grade lubricating oil is required for rail lubrication to avoid particles affecting motion accuracy.