3D surface profilometerIt is a precision measuring instrument used for high-precision measurement of three-dimensional surface morphology of objects, widely used in fields such as electronics, automotive, semiconductor, materials science, and industrial testing.
3D surface profilometerThe performance is determined by key technical parameters, and the requirements for parameters vary significantly in different application scenarios. When purchasing, the following indicators should be focused on:
1. Measurement range:
Including horizontal range (X/Y axis, determining the maximum size of the measurable sample) and vertical range (Z axis, determining the maximum height difference of the measurable surface).
2. Resolution:
Vertical resolution: a core indicator that measures the ability to distinguish small height differences on a surface;
Lateral resolution: measures the ability to distinguish small lateral features on a surface, which is related to the objective magnification and detector pixels of the optical system.
3. Measurement accuracy:
The deviation between the measurement result and the true value usually includes linear error (linearity of Z-axis displacement), repeatability error (deviation of multiple measurements at the same position), and flatness error (measurement deviation of calibration plane).
4. Measurement speed:
Depending on the scanning method (point by point scanning, line scanning, area scanning) and data processing efficiency:
Structured light projection type: surface scanning, fast speed (millisecond level, suitable for online detection);
Atomic force microscope: point by point scanning, slow speed (minute level, suitable for offline precision analysis);
White light interferometer: line scanning, moderate speed (from seconds to minutes, balancing accuracy and efficiency).
5. Sample compatibility:
Including the material of the sample (metal, non-metal, transparent/opaque, conductive/insulating), size (whether it is compatible with the sample stage), and surface condition (smooth/rough, dry/wet).