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E-mail
lu.yan@leboscience.cn
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Phone
13584134215
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Address
5th Floor South, Building A, Chuangzhi Industrial Park, 201 Jinshan Road, Jiangyin, Jiangsu
Jiangsu Leibo Scientific Instrument Co., Ltd
lu.yan@leboscience.cn
13584134215
5th Floor South, Building A, Chuangzhi Industrial Park, 201 Jinshan Road, Jiangyin, Jiangsu
Traditional equipment is prone to problems such as uneven film thickness and large temperature fluctuations during high-speed rotary coating.The chamber of the Leibo homogenizer adopts a special design, which can maintain excellent uniformity in the nanoimprint process:
A. Uniformity of adhesive:8-inch wafer,BKMData accessibility±1.1%.
4-inch wafer BKM data: on-chip ± 0.49%, on-chip ± 0.55%.
6-inch waferBKM dataWithin slice ± 0.76%, between slice ± 0.91%.
8-inch waferBKM dataWithin slice ± 0.92%, between slice ± 1.10%.
B. Panel uniformity:Within the 8/12 inch circular area,BKMData accessibility≤±1%. (Temperature resolution: 0.1 ℃,Temperature control accuracy: ± 0.2 ℃,Linear heating range: 0.5 ℃/min~10 ℃/min, within the linear region)






AC200 glue mixing machine (customized machine)
For AZ 5214E adhesive solution, with a film thickness of 2 µ m on 8-inch pieces, the Leibo AC200 glue homogenizer can maintain excellent uniformity:
Uniformity within the film:BKM 0.54%,Inter slice uniformity:1.14%.

4-inch wafer uniformity: ± 0.39%

8-inch wafer uniformity: ± 1.3%

1. For cavity useHDPE material(Acid and alkali resistance superior to PP).
2. Selection of Plastic Load TraysPPS material(It has better chemical corrosion resistance than PP, better insulation under high temperature and high humidity conditions, and has good flame retardancy).
3. The spindle motor adopts high-precision servo motor, combined with self-developed control algorithm, and can also operate at high speed (10000rpm)stable maintenanceDeviation less than 1rpm, andStable acceleration output.
4.Anti blocking adhesive designLarge capacity liquid collection bottleExtend maintenance cycle(Under the same usage frequency, our company uses it once a month).
5.Separate waste discharge and exhaust independentlyTo avoid pollution affecting the exhaust duct.
6.The device can operate with an open/closed lidAdapt to more application environments.
7.Standard oil-free vacuum pumpEstablishing a vacuum does not require the introduction of compressed air, etc.
8. Flat UI design,One click operation modeExtremely easy to learn, with almost no operational learning cost.
9. Selection of medication valveFirst tier imported brands CKD and XiaojinjingWait, the liquid supply and suction are stable and reliable (customized model).
10.Semi automated swing armDesigned to achieve multiple dispensing methods including fixed-point, swinging, and sliding (customized models).
11. Family style unified appearance design, shell spray coating process,corrosion-resistant.

