A film thickness gauge is an instrument that uses principles such as optics, electronics, or radiation to accurately measure the thickness of thin films or coatings. It is widely used in fields such as semiconductors, optics, materials science, biomedicine, and environmental protection.
The core principle of the film thickness measuring instrument is based on the interference and reflection of light. When the light wave shines on the tested film layer, some of the light waves reflect on the surface of the film layer, while others penetrate the film layer and reflect at the interface between the film layer and the substrate. These two reflected light waves interfere due to the optical path difference, forming an interference pattern. By analyzing the interference pattern, the phase difference information of light waves can be obtained, and the thickness of the film layer can be accurately calculated through mathematical relationships. This method has the advantages of non-contact, high accuracy, and no damage, and the measurement accuracy can reach the nanometer level.
Function of film thickness measuring instrument:
Semiconductor manufacturing: The performance of semiconductor devices is closely related to the thickness of the internal thin films. The film thickness measuring instrument can achieve high-precision measurement and real-time monitoring of thin films such as gate oxide layers and metal interconnects, providing reliable quality assurance for semiconductor manufacturers.
Optical thin film: The thickness of an optical thin film has a significant impact on its optical properties. The film thickness measuring instrument can accurately measure the thickness of thin films such as anti reflective films, reflective films, and filters, ensuring that they achieve specific optical functions.
Materials Science: Film thickness measuring instruments can help researchers understand the growth mechanism, structure, and properties of thin films, providing theoretical basis for material design and preparation.
Biomedical: Membrane thickness measuring instruments can be used to measure the thickness of key thin films such as biofilms and drug coatings, providing important information for the diagnosis and treatment of diseases.
Environmental protection: The film thickness measuring instrument can be used to monitor the deposition of atmospheric pollutants on solid surfaces, providing scientific basis for the assessment and treatment of environmental pollution.
Operation and Maintenance
Calibration requirements: A standard film thickness sheet should be used for calibration before initial use; Regular (monthly/quarterly) calibration to ensure accuracy;
Sample preparation: Clean the surface of the sample before measurement (remove oil stains and dust); Contact measurement should avoid scratching the surface of the sample;
Environmental requirements: High precision measurements must be conducted in a constant temperature (20 ± 2 ℃) and vibration free environment; Laser film thickness gauge should avoid strong light interference;
Daily maintenance: Keep the probe/laser head clean; Avoid instrument collisions (especially contact probes); Regularly replace worn parts such as probes and sensors.