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E-mail
317399383@qq.com
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Phone
15955179814
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Address
No. 9996 Susong Road, Economic Development Zone, Hefei City, Anhui Province
Hefei Zhongguang Electronic Technology Co., Ltd
317399383@qq.com
15955179814
No. 9996 Susong Road, Economic Development Zone, Hefei City, Anhui Province
The developing machine is the core equipment in the photolithography process, and its core function is to convert the "latent image" (invisible to the naked eye) formed by exposing the photoresist on the wafer surface into clear and visible fine circuit patterns through chemical reactions. It is a key link connecting "exposure" and "etching" in semiconductor chip manufacturing and precision electronic component production.
The workflow of the developing machine can be simplified into three steps: first, transport the exposed wafer to the developing chamber; Subsequently, by spraying or soaking, the developer solution is uniformly applied to the surface of the wafer, selectively dissolving the unexposed (positive photoresist) or exposed (negative photoresist) photoresist to reveal the latent image; Finally, after cleaning to remove residual developer and drying to solidify, a stable circuit pattern foundation is formed.
Its core structure includes a conveying system (ensuring smooth and accurate wafer transfer), a developing system (controlling the temperature, concentration, and duration of the developing solution), a cleaning and drying system (improving graphic stability), and a control system (achieving automated and precise control). With the advancement of chip processes towards 3nm and below, developing machines are developing towards higher precision, efficiency, and intelligence, providing core support for the miniaturization and high-density development of the semiconductor industry.