Recently, the "High Speed Multi Axis High Resolution Laser Interference Measurement Technology and Instruments" project completed by Tsinghua University won the first prize of the 2018 China Society for Metrology and Testing Science and Technology Progress Award.
Measurement is the foundation of science and technology, and a tool for human understanding of the world. The three technological revolutions in human history are closely related to breakthroughs in measurement and testing technology. The achievements of measurement and testing technology play an important role in promoting the progress and development of other sciences and technologies. Laser interferometry measurement is an effective means of achieving ultra precision measurement and micro nano scale measurement, an important way to ensure traceable nano measurement, and a key metrology testing technology towards becoming a strong metrology and manufacturing country.
The project team focuses on the ultra precision positioning of lithography machine workbenches, basic metrology measurement, and laser applications in instrument applicationsinterferometerTo meet the measurement requirements of high dynamics, high resolution, cross scale, and traceability, we will conduct in-depth research on common scientific and technological issues in measurement principles, methods, and measurement system instrumentation. We will break through key technologies such as integrated multi axis interferometry, signal demodulation, and refractive index compensation, and form a complete set of independent high-performance laser interferometry measurement systems; Propose a series of laser interferometry measurement methods that can be traced back to length or frequency benchmarks, achieving high-precision measurements with uncertainties in the skin and nanometer levels; A series of knowledge product achievements have been formed, and the research results support the high-precision positioning of independently developed lithography machines and lasers in Chinavibration meterThe signal demodulation and other applications have been selected for the National 12th Five Year Plan Science and Technology Innovation Achievement Exhibition.
The project has developed a fully chain self-developed high-speed, multi axis large range, high-resolution laser interferometry measurement system from interferometer components, signal detection and demodulation to multi degree of freedom detection scheme design. It proposes a series of laser interferometry precision measurement methods with optical frequency traceability. As of now, the project has been authorized to invent more than 20 patents and has published over 30 SCI indexed papers.
In addition, the lithography machine developed by the project team uses dual frequency technologylaser interferometerThe system has been successfully applied in the research and development process of China's self-developed lithography machine workpiece table prototype, with a total of more than 50 sets of applications, which well meets the precision measurement needs of the lithography machine dual workpiece table prototype, supports the formation of the dual frequency laser interferometer capability for lithography machines, reduces the dependence on foreign interferometers, and provides excellent performance and independent measurement and traceability capabilities for equipment and instrument research and development in China.
The "China Society for Metrology and Testing Science and Technology Progress Award" is a provincial-level science and technology progress award registered and filed with the National Science and Technology Awards Office. The project applying for the first prize requires that the overall technology has been formally applied for more than three years and has achieved significant economic or social benefits. At present, the product has been successfully applied in multiple fields such as aerospace, automotive manufacturing, and machine tool testing, becoming a powerful support tool for improving the quality of Chinese manufacturing products.