The Sensofar S neox seamlessly switches between confocal, interferometric, and multifocal overlay technologies, achieving full range measurement coverage from sub nanometer smooth surfaces to millimeter level rough structures.
Confocal technology filters non focal light through pinholes to obtain high contrast two-dimensional images, which are then scanned vertically to construct a 3D morphology. The lateral resolution of this mode reaches 0.10 μ m. When paired with a 150x, 0.95 numerical aperture lens, the slope of smooth surface measurement reaches 70 °, rough surface measurement reaches 86 °, and the Z-axis measurement repeatability is stable at the nanometer level. Suitable for identifying fine structures such as small lines and gaps, such as detecting the circuit morphology of semiconductor chips.
White light interference and phase shift interference modes are optimized for surfaces with different smoothness levels: white light interference has a longitudinal resolution of 0.1nm and is suitable for slightly rough surfaces; Phase shift interferometry achieves sub nanometer level accuracy, designed specifically for ultra smooth surfaces, and both are not affected by amplification factors. The multi focal plane overlay technology focuses on rough surfaces with a single scan depth of 8mm, which can meet the measurement needs of complex structures such as molds and additive manufacturing parts.
The switching of these modes is automatically completed through the intelligent optical engine, and users only need to click once to operate, and the system will select the appropriate technology based on the characteristics of the measurement task. For example, when measuring the ultra smooth surface of optical lenses, it automatically switches to phase shift interferometry; When detecting the rough structure of the mold, activate the multi focal plane overlay mode.
Technical Mode Adaptation Table
When in use, users do not need to manually determine the mode adaptation. The software will automatically recommend based on the surface characteristics of the preview image, or they can manually select it in the "Advanced Settings". This design significantly enhances the device's adaptability to different samples, covering measurement needs in multiple industries such as electronics, automotive, and healthcare.