In the analysis of VOCs in ambient air, thermal desorption gas chromatography-mass spectrometry (TD-GC/MSD) is a commonly used detection method in environmental monitoring laboratories and clean rooms in the semiconductor industry. There are generally two common methods for sample collection. The first method is to use adsorption tubes for sample collection and pre enrichment, and then analyze through TD-GC/MSD system. HJ 734-2014 [2] method specifies the use of adsorption tubes and TD-GC/MSD to detect 24 VOCs. Markes International has released an application brief based on the HJ734 method, which introduces the excellent performance results obtained using the adsorption tube sampling method [3]. Another method is to use a pre evacuated sampling tank to collect samples and use low-temperature condensation for pre enrichment. The HJ759-20234 standard provides a detailed introduction to the method of using tank sampling to determine 65 VOCs in ambient air.

This study referred to the HJ759-2023 method and conducted qualitative and quantitative analysis of 65 VOCs through tank sampling. The results obtained have excellent linearity, high accuracy, and reproducibility. This fully demonstrates the full flow inertness, high sensitivity, and durability of the entire TD-GC/MSD system.