Yushi Technology Capacitive Metal Thin Film Vacuum Gauge

NegotiableUpdate on 12/18

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Nature of the Manufacturer: Producers

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Overview

The capacitive metal thin film vacuum gauge (heating type) of Yushi Technology adopts a single-sided dual electrode differential capacitor design, and the material exposed to the process gas is all Inconel/Incoy alloy.

Product Details

Yushi Technology Capacitive Metal Thin Film Vacuum Gauge（Heating type）

The heated capacitive metal film vacuum gauge adopts a single-sided dual electrode differential capacitor design, and all materials exposed to process gases areInconel/IncoloyAlloy, ultra-high sensitivity front-end circuit and * algorithm ensure high sensitivity and measurement accuracy under working pressure, fast response, stable performance, strong corrosion resistance, providing45℃to120℃Multiple constant temperature versions,0.1Torrto1000TorrThe entire series has a full-scale range and excellent performance, making it an ideal choice for precise total pressure measurement and control in demanding semiconductor and plasma, high-risk material purification, and other applications.

DMG100The series pressure sensors have relay output functions for constant temperature faults and equipment faults.

advantage

1.Constant temperature metal thin film differential capacitive absolute pressure sensor

lhigh sensitivity

lHigh precision and repeatability

lHigh long-term stability

2.All sensors are sturdy and corrosion-resistantInconel合金

lNot dependent on gas, measurement results are independent of gas composition

lAllow use with corrosive or dirty gases

lVacuum gauge material has no pollution to the process

3. Rich output signal

lEasy to integrate, with rich interfaces to meet various system integration requirements

lindependentType CDiagnosis, debugging, and configuring interfaces

4.Fault output function/Pressure triggered output function

lOutput through relay: constant temperature fault and equipment fault/Pressure triggered signal

Yushi Technology Capacitive Metal Thin Film Vacuum Gauge（Heating type）

Technical Specifications

indicator	Specifications
Full scale range	0.1Torr，1Torr，10Torr，100Torr，1000Torr
precision	≥1Torr±0.25%The reading,<1Torr±0.50%The reading
resolution	0.001%FS
Suggested reading range	0.005V to 10V@FS
Suggest controlling the pressure range	0.05V to 10V@FS
Equipment internal temperature options	45℃，80℃，100℃
warm-up time	2hour≥1Torr；4Hour ＜1Torr
ambient temperature	15to40℃@45℃Internal constant temperature
Trigger function	Optional, two single pole dual position switches, distribution can be set0.1%~100%FSAny pressure, relay capacity0.6A@30VDC
Fault output function	Optional, output constant temperature faults and equipment faults through relays
output	0-10VDCAnalog output,>10KOhm;RS422Output（RS485Optional)
Electrical connector	D-Sub，15Foot and pin sockets;M8Flight plug,5Foot, hole socket
input power	±15VDC（±5%）The24VDC（±5%）Or20~26VDC;peak40W@100 ℃，35W@45 ℃
Overpressure limit	45Psia
Materials exposed to process gases	The injection tube is316LMaterials, all others areInconelandIncoloy合金
Sensor response time	≥1Torr 25Milliseconds; ＜1Torr 50millisecond
calibration direction	Default vertical calibration, horizontal calibration optional
internal volume	5.1ml(Excluding injection interface)

Hangzhou Yushi Technology Co., LtdFocusing on providing technical services and solutions related to flow, pressure, vacuum detection and control for industrial and scientific research customers, the company acts as an agent and distributor in the United StatesALICAT、 Swiss Vogtlin, American MKS, Japanese EBARA and other brands, combined with their agent products, provide customers with high-quality flow and pressure monitoring solutions, aiming to improve customers' research and production efficiency, improve their manufacturing processes, and promote their scientific research and innovation progress.