Yushi Technology Capacitive Metal Thin Film Vacuum Gauge

Yushi Technology Capacitive Metal Thin Film Vacuum Gauge(High temperature type)

The high-temperature capacitive metal film vacuum gauge adopts a single-sided dual electrode differential capacitor design, and all materials exposed to process gases areInconel/IncoloyAlloy, ultra-high sensitivity front-end circuit and * algorithm ensure high sensitivity and measurement accuracy under working pressure, fast response, stable performance, strong corrosion resistance, providing150℃to200℃Two high-temperature versions greatly improve the impact of deposited materials on capacitor membranes, providing1Torrto1000TorrFull scale range, excellent performance, suitable for demanding semiconductors、plasmaandPurification of high-risk materials, etcThe field, yesThe ideal choice for precise total pressure measurement and control.

advantage

1.High temperature metal thin film differential capacitive absolute pressure sensor

lhigh sense

lHigh precision and repeatability

lHigh long-term stability

2.All sensors are sturdy and corrosion-resistantInconel合金

lNot dependent on gas, measurement results are independent of gas composition

lAllow use with corrosive or dirty gases

lVacuum gauge material has no pollution to the process

3.Rich output signal

lEasy to integrate, with rich interfaces to meet various system integration requirements

lindependentType CDiagnosis, debugging, and configuring interfaces

4.Fault output function/Pressure triggered output function

lOutput through relay: constant temperature fault and equipment fault/Pressure triggered signal

Yushi Technology Capacitive Metal Thin Film Vacuum Gauge(High temperature type)

Technical Specifications

indicator	Specifications
Full scale range	1Torr, 10Torr, 100Torr, 1000Torr，定制
precision	± 0.5% reading
resolution	0.001%FS
Suggested reading range	0.005V to 10V@FS
Suggest controlling the pressure range	0.05V to 10V@FS
Equipment internal temperature options	150℃，200℃
warm-up time	4 hours
ambient temperature	15 to50℃
Trigger function	Optional, two single pole dual position switches, distribution can be set0.1%~100% FS arbitrary pressure, relay capacity 0.6A@30VDC
Fault output function	Optional, output constant temperature faults and equipment faults through relays
output	0-10VDC analog output,>10K ohms; RS422 output (RS485 optional)
Electrical connector	D-Sub， 15 pin, pin socket; M8 aviation plug, 5-pin, hole socket
input power	± 15VDC (± 5%), 24VDC (± 5%), or 20-26VDC; peak50W@150℃，70W@200℃
Overpressure limit	45Psia
Materials exposed to process gases	The injection tube is316L material, the rest are Inconel and Incoloy alloys
Sensor response time	50 milliseconds
calibration direction	Default vertical calibration, horizontal calibration optional
internal volume	5.1ml (excluding injection interface)

Hangzhou Yushi Technology Co., LtdFocusing on providing technical services and solutions related to flow, pressure, vacuum detection and control for industrial and scientific research customers, the company acts as an agent and distributor in the United StatesALICAT、 Swiss Vogtlin, American MKS, Japanese EBARA and other brands, combined with their agent products, provide customers with high-quality flow and pressure monitoring solutions, aiming to improve customers' research and production efficiency, improve their manufacturing processes, and promote their scientific research and innovation progress.