Yushi Technology Capacitive Metal Thin Film Vacuum Gauge

NegotiableUpdate on 12/18

Model

Nature of the Manufacturer: Producers

Product Category

Place of Origin

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Overview

The capacitive metal thin film vacuum gauge (temperature compensated type) of Yushi Technology adopts a single-sided dual electrode differential capacitor design, and the material exposed to the process gas is all Inconel/Incoy alloy.

Product Details

Yushi Technology Capacitive Metal Thin Film Vacuum Gauge(Warm compensation type)

The temperature compensated capacitive metal film vacuum gauge adopts a single-sided dual electrode differential capacitor design, and all materials exposed to process gases areInconel/IncoloyAlloy, ultra-high sensitivity front-end circuit and * algorithm ensure high sensitivity and measurement accuracy under working pressure, fast response, stable performance, strong corrosion resistance, and unique temperature compensation algorithm helps the product stabilize quickly. provide1Torrto1000TorrFull scale range, with low cost and high performanceCharacteristics ofSuitable for harsh production and processing environments such as coating industry, semiconductor and plasma applications，for itProvide stable performance.

advantage

1.Temperature compensated metal thin film differential capacitive absolute pressure sensor

lhigh sense

lHigh precision and repeatability

lHigh long-term stability

lQuickly reach the working state

2.All sensors are sturdy and corrosion-resistantInconel合金

lNot dependent on gas, measurement results are independent of gas composition

lAllow use with corrosive or dirty gases

lVacuum gauge material has no pollution to the process

3.Rich output signal

lEasy to integrate, with rich interfaces to meet various system integration requirements

lindependentType CDiagnosis, debugging, and configuring interfaces

4.Pressure triggered output function

lOutput pressure trigger signal through relay

Yushi Technology Capacitive Metal Thin Film Vacuum Gauge(Warm compensation type)

Technical Specifications

indicator	Specifications
Full scale range	1Torr, 10Torr, 100Torr, 1000Torr，定制
precision	± 0.5% reading
resolution	0.001%FS
Zero temperature coefficient%Full range/℃	0.015%
Range temperature coefficient%Reading/℃	0.02%
Suggested reading range	0.005V to 10V@FS
Suggest controlling the pressure range	0.05V to 10V@FS
Equipment internal temperature options	Non constant temperature, temperature compensation algorithm
warm-up time	30 minutes
ambient temperature	0to40℃
Trigger function	supportTwo single pole dual position switches with adjustable distribution0.1%~100% FS arbitrary pressure, relay capacity 0.6A@30VDC
Fault output function	Optional, output constant temperature faults and equipment faults through relays
output	0-10VDC analog output,>10K ohms; RS422 output (RS485 optional)
Electrical connector	D-Sub， 15 pin, pin socket; M8 aviation plug,7Foot, hole socket
input power	± 15VDC (± 5%), 24VDC (± 5%), or 20-26VDC;5W
Overpressure limit	45Psia
Materials exposed to process gases	The injection tube is316L material, the rest are Inconel and Incoloy alloys
Sensor response time	25 milliseconds
calibration direction	Default vertical calibration, horizontal calibration optional
internal volume	5.1ml (excluding injection interface)

Hangzhou Yushi Technology Co., LtdFocusing on providing technical services and solutions related to flow, pressure, vacuum detection and control for industrial and scientific research customers, the company acts as an agent and distributor for brands such as ALICAT in the United States, Vogtlin in Switzerland, MKS in the United States, and EBARA in Japan. Combining the products we represent, we provide customers with high-quality flow and pressure monitoring solutions, aiming to improve their research and production efficiency, enhance their manufacturing processes, and promote their scientific research and innovation progress.