Yushi Technology Capacitive Metal Thin Film Vacuum Gauge

NegotiableUpdate on 12/18

Model

Nature of the Manufacturer: Producers

Product Category

Place of Origin

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Overview

The capacitive metal thin film vacuum gauge (two-stage range) of Yushi Technology adopts a single-sided multi electrode differential capacitor design, and the material exposed to the process gas is all Inconel/Incoy alloy.

Product Details

Yushi Technology Capacitive Metal Thin Film Vacuum Gauge(Two ranges)

The two-stage capacitive metal film vacuum gauge adopts a single-sided multi electrode differential capacitor design, which expands the measurement range under the premise of ultra-high sensitivity. With excellent algorithms, it is suitable for high-precision measurement of medium vacuum and rough vacuum in a wide range, with fast response and stable performance. All materials exposed to process gases areInconel/IncoloyAlloy, with strong corrosion resistance, the entire measurement range does not depend on the type of gas. Provide from45℃to100℃Multiple constant temperature versions.

advantage

1.Two end range capacitance metal film absolute pressure sensor

lhigh sense

lHigh precision and repeatability

lHigh long-term stability

lWide measurement range

2.All sensors are sturdy and corrosion-resistantInconel合金

lNot dependent on gas, measurement results are independent of gas composition

lAllow use with corrosive or dirty gases

lVacuum gauge material has no pollution to the process

3.Rich output signal

lEasy to integrate, with rich interfaces to meet various system integration requirements

lindependentType CDiagnosis, debugging, and configuring interfaces

Yushi Technology Capacitive Metal Thin Film Vacuum Gauge(Two ranges)

Technical Specifications

indicator	Specifications
Full scale range	1Torr, 10Torr, 100Torr, 1000Torr，定制
precision	Basic range; Expand the range
resolution	0.001%FS
Suggested reading range	0.005V to 10V@FS
Suggest controlling the pressure range	0.05V to 10V@FS
Equipment internal temperature options	constant temperature45 ℃, optional temperature: 80 ℃, 100 ℃
warm-up time	2hour
ambient temperature	15 to40℃
Trigger function	Optional, two single pole dual position switches, distribution can be set0.1%~100% FS arbitrary pressure, relay capacity 0.6A@30VDC
Fault output function	Optional, output constant temperature faults and equipment faults through relays
output	0-10VDC analog output,>10K ohms; RS422 output (RS485 optional)
Electrical connector	D-Sub， 15 pin, pin socket; M8 aviation plug,9Foot, hole socket
input power	± 15VDC (± 5%), 24VDC (± 5%), or 20-26VDC; peak35W@45℃
Overpressure limit	45Psia
Materials exposed to process gases	The injection tube is316L material, the rest are Inconel and Incoloy alloys
Sensor response time	25 milliseconds
calibration direction	Default vertical calibration, horizontal calibration optional
internal volume	5.1ml (excluding injection interface)

Hangzhou Yushi Technology Co., LtdFocusing on providing technical services and solutions related to flow, pressure, vacuum detection and control for industrial and scientific research customers, the company acts as an agent and distributor for brands such as ALICAT in the United States, Vogtlin in Switzerland, MKS in the United States, and EBARA in Japan. Combining the products we represent, we provide customers with high-quality flow and pressure monitoring solutions, aiming to improve their research and production efficiency, enhance their manufacturing processes, and promote their scientific research and innovation progress.