Yushi Technology Capacitive Composite Vacuum Gauge

NegotiableUpdate on 12/18

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Overview

Yushi Technology's capacitance composite vacuum gauge (Pirani) combines the advantages of capacitive ceramic thin film sensor technology and Pirani sensor into one product, while also possessing high precision and wide range.

Product Details

Yushi Technology Capacitive Composite Vacuum Gauge(Pirani)

Yunshi Technology Pirani Capacitive Composite Vacuum GaugeIntegrating the advantages of capacitive ceramic thin film sensor technology and Pira sensor into one product, while also possessing high precision and wide range.

measurement range3.8×10^-5Backto1500TorrThe coarse vacuum section adopts ceramic capacitive thin film sensors, which have high measurement accuracy and are independent of gas types. Higher vacuum section usageMEMSPirani sensor. Suitable for measuring the range of neutral and coarse vacuum, widely used in self-locking control, system safety circuits, front-end vacuum pressure measurement, and precise pressure measurement and control. It is a medium coarse vacuum range with internal pressure control that pursues cost-effectivenessgoodchoice

advantage

1.Composite pressure sensor

lhigh precision(10Torr-1500Torr)Less than the reading<0.5%),And it is independent of the gas composition

lwide range(3.8×10－5Torrto1500Tor)

2.cost-effective

3.Rich output signal

lEasy to integrate, with rich interfaces to meet various system integration requirements

lindependentType CDiagnosis, debugging, and configuring interfaces

4.Pressure triggered output function

5.Real time pressure screen display function

Yushi Technology Capacitive Composite Vacuum Gauge(Pirani)

Technical Specifications

indicator	Specifications
measurement range	3.8×10^-5Torr to 1500 Torr
precision	3.8×10^-5 - 1×10^-⁴Torr reading ± 50% @ nitrogen/air calibration; 1×10^-4-20 Torr accuracy ± 15% @ nitrogen/air calibration; 0.05-10Torr accuracy ± 10% @ independent of gas type (optional); 10-1500Torr accuracy ± 0.5% @ independent of gas type (optional);
resolution	0.001%FS
Equipment internal temperature options	Non constant temperature, temperature compensation algorithm
warm-up time	10 minutes
ambient temperature	0to40℃
Trigger function	support
output	configurable0-10VDC analog output,>10K ohms; RS422 output (RS485 optional)
Electrical connector	FCC68 8pin(Optional)D-Sub 9-pin socket); M8 aviation plug, 5-pin, hole socket
input power	9~36VDC；3W
Overpressure limit	2000 Torr
Materials exposed to process gases	316LAluminum oxide ceramics, silicon, silicon dioxide, silicon nitride, aluminum, glass, gold, rubber
Sensor response time	≥ 20Torr for 25 milliseconds; <20Torr 50ms
calibration direction	In any direction
internal volume	1. 1ml (excluding injection interface)

Pirani vacuum gaugebased onPrinciple of heat conductionBy measuring the heat loss rate of a heating wire in a vacuum environment (as a function of gas molecule density)/The indirect measurement of vacuum pressure is achieved by the resistance or temperature changes caused by pressure changes.

Hangzhou Yushi Technology Co., LtdFocusing on providing technical services and solutions related to flow, pressure, vacuum detection and control for industrial and scientific research customers, the company acts as an agent and distributor in the United StatesALICAT、 Swiss Vogtlin, American MKS, Japanese EBARA and other brands, combined with their agent products, provide customers with high-quality flow and pressure monitoring solutions, aiming to improve customers' research and production efficiency, improve their manufacturing processes, and promote their scientific research and innovation progress.