YAMATO plasma cleaning machine PR500/510/1000 DP mode, barrel type

NegotiableUpdate on 01/17

Model

Nature of the Manufacturer: Producers

Product Category

Place of Origin

Online Consult

Overview

Low temperature plasma · Classic barrel shape

Product Details

Low temperature plasma · Classic barrel shape.

PR500： Manual control PR510: automatic touch screen control
Inner groove
Silicon wafer ashing state
The classic model of low-temperature plasma is very historic. Adopting automatic coordination function and touch screen operation (PR510), it improves operability and safety, and is a small and compact plasma processing equipment.

● Remove photoresist
● Component cleaning
● Interface activation treatment
● Micro grinding
Silicon wafer, corresponding to glass substrate

purpose
Large diameter (Φ 215mm) quartz reaction chamber
● Small integrated design

Specifications:

model	PR500	PR510
Plasma mode	DP mode, barrel shaped
High frequency output power	Max500W
Frequency	13.56MHz
Homology method	Automatic coordination
Reaction chamber	Quartz Φ 215 × 305mm
Reactive gas	System 2 (O2/CF4)
Control	Manual	Touch screen automatic control
Piping material	Stainless steel, Teflon
External dimensions	W438 x D520 x H760mm	Refer to the specification sheet
Weight	About 60kg	Refer to the specification sheet
Power Supply	Single phase AC100V 9A	Three phase AC200V 8A