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Shanghai Hengshang Precision Instrument Co., Ltd
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Shanghai Hengshang Precision Instrument Co., Ltd

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    sales@hsinstrument.com

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    Room 1603-1604, No. 400 Caobao Road, Xuhui District, Shanghai

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Wafer heating plate

NegotiableUpdate on 10/11
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Overview

Suitable for testing wafers of different sizes, it can be used for various probe stations, temperature control, and electrical testing.

Product Details

Temperature range -120 ℃~400 ℃ Temperature stability ± 0.05 ℃ Temperature uniformity ± 2% Sample area 2 inches~12 inches Table flatness 25um Table potential Electrical grounding Three coaxial back electrode optional Adaptation instrument Manual probe station Semi automatic probe station Laser annealing Applicable fields Semiconductor chip OLED optical temperature change wafer testing