Swiss VAT vacuum gate valve cooperative supplier in China

Swiss VAT vacuum gate valve cooperative supplier in China

VAT is a Swiss company that holds an absolute position in the field of vacuum valves. Since its establishment in 1964, VAT has achieved specialized operations in the field of vacuum valve technology. Due to its R&D innovation and renowned high quality in the industry, semiconductor chip equipment, solar equipment manufacturers, universities, and research institutions around the world have widely adopted VAT's products. The valves produced by VAT are standard components in the industry for vacuum generation and research systems.

VAT valves are mainly used in industries such as semiconductor processing, glass or coating equipment, high-energy physics (scientific research), synchrotron (scientific research), laser technology, space simulation, metallurgy, surface analysis, etc. The products include: plug valves, butterfly valves, transfer valves, diaphragm valves, angle valves, etc., which are highly sensitive and reliable control vacuum valves.

Product Service:

Swiss VAT valves, gate valves, pendulum valves, control valves, angle valves, diaphragm valves, connecting components, multi valve modules, heaters, coatings

Brand Introduction:

VAT Vacuum Valve Company is an active Swiss company in the market, specializing in the development, manufacturing, and sales of vacuum valves. The product is widely used in the semiconductor, coating industry and research and development, flat panel display manufacturing, glass and tool coating, metallurgy, surface analysis, high-energy physics, synchrotron, laser technology, and space travel simulation fields.

Main models:

010 series, 012 series, 081 series, 091 series, 108 series, 110 series, 121 series, 140 series, 150 series, 152 series, 162 series, 168 series, 640 series, 641 series, 650 series, 652 series, 022 series, 032 series, 043 series, 075 series, 076 series, 066 series, 211 series, 214 series, 216 series, 245 series, 264 series, 471 series, 773 series, 790 series, 790 series

Introduction to some products of Ruishang VAT

1. VAT gate valve

The VAT compact mini ultra-high pressure gate valve with modular actuator concept is very suitable for industrial and R&D applications. It is commonly used in pipelines of semiconductor process systems. Insert Version

Integrated into the vacuum system (without valve body), higher sealing materials (Chemraz, EPDM, etc.), with VITON made seals, replaceable, special valve gate, suitable for

Install various orifice plates together.

2. VAT butterfly valve

VAT butterfly valve is a butterfly pressure control valve used in downstream applications. Equipped with a very fast and robust actuator, high performance, integrated controller, and extremely short control response time and position indication

Display, automatic maintenance indicator, excellent anti pollution ability. The controller of this valve ensures very fast and accurate pressure control. By operating the L EARN function, only

It needs to be executed once to automatically determine the system parameters. Due to the use of adaptive algorithms, the controller can continuously adapt to process conditions (gas type, gas flow rate), thereby

Ensure optimal pressure control at all times.

B. VAT conversion valve

The VAT conversion valve is used for load locking and process chamber isolation in semiconductor production systems for 200.300 and 450mm wafers. Double acting pneumatic actuator, made of aluminum and stainless steel as the main material

Steel and corrugated pipes are protected and have a long service life, with an expected lifespan of over 5 million cycles. The nominal inner diameter ranges from 32x222 to 56x496 millimeters.

4. VAT angle valve

VAT angle valves are suitable for most corrosive gases and have extremely low degassing rates. When the exhaust rate is extremely low, it is important for the pumping and exhaust of ultra-high pressure systems. Resistant to high pressure difference, fixed type

Rotating CF flange can perform 3 million cycles at a maximum temperature of 80 ° C. The main material is stainless steel, and the actuator types are divided into manual actuator (handwheel) and pneumatic actuator (single closed)

Hole with closed spring NC).

5. VAT soft start valve

The VAT soft start valve consists of two halves of throttle valve discs, which are supported on a common shaft and held in the open position by springs. The axis is kept in the ISO KF center ring, which is the center ring

Formed as a main body with a valve seat. When installing them between two SO-KF flanges (instead of centering rings), the opened valve must be aligned with the airflow in the vacuum pipeline

When the machining system is put into operation, a strong airflow will be generated in the rough machining pipeline, which will immediately close the valve and reduce the pipe section by about 99%. When a pressure difference of about 2% is reached

At 15mbar, the valve opens and leaves the pipeline almost unobstructed for progressive pumping.

Swiss VAT vacuum gate valve cooperative supplier in China