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-
Address
413-415, Building 4, No. 655 Gaoji Road, Songjiang District, Shanghai
Shanghai Maoshuo Machinery Equipment Co., Ltd
413-415, Building 4, No. 655 Gaoji Road, Songjiang District, Shanghai
Swiss VAT-09.1- High Vacuum Gate Valve with Protective Ring
If the proportion of by-products in the airflow is high, the sediment formed may cause valve failure and unplanned maintenance work. High vacuum gate valves with protective rings can avoid this problem. Thanks to its special wedge-shaped design with self-cleaning function and protective ring, even if there is a large amount of sediment on the valve seat, this high vacuum gate valve can still be opened and closed smoothly. Due to the wedge-shaped design of the valve plate, sediment will be specifically pushed away from the valve seat or seal to ensure reliable sealing at all times. In addition, the protective ring covers the housing in the open position of the valve to prevent any sediment from accumulating in the plate. The 09.1 high vacuum gate valve can operate normally under a pressure difference of up to 1 bar.
The high vacuum gate valve with protective ring 09.1 has been installed in harsh applications under various process conditions, proving its reliability in the field of secondary wafer fab applications. It can be easily integrated into any application.
09.1 High vacuum gate valves with protective rings are of pneumatic type. The standard voltage for the control valve is 24 VDC. The standard sealing material is fluororubber, but other materials can be used according to requirements. In addition, it can also integrate soft suction function and add additional access points for measuring instruments, etc.
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09.1 High vacuum gate valve with wedge-shaped design
09.2 HV wedge design high vacuum plug valve
Features:
Due to its wedge-shaped design, this high vacuum gate valve has self-cleaning function
The protective ring can prevent the accumulation of sediment
The valve can open when the pressure difference reaches up to 1 bar
Advantages:
Excellent reliability under extremely harsh conditions
Extended maintenance cycle
Low operating costs
Technical Specifications:
size |
DN 100mm (4') |
||
|---|---|---|---|
drive |
pneumatic | double-acting | |
Valve body material |
stainless steel |
||
feedthrough component |
bellows |
||
Standard flange |
ISO-F | ||
leakage rate |
valve body |
< 1 × 10-9mbar ls-1 | |
| valve seat | < 1 × 10-7mbar ls-1 | ||
pressure range |
1 × 10-8Mbar to 1.2 bar (absolute pressure) | ||
The valve plate can withstand pressure difference |
≤ 1.2 bar | ||
Can withstand pressure difference when opened |
≤ 1 bar | ||
Number of switches before maintenance |
1000 times | ||
temperature
|
valve body |
≤ 150 °C | |
drive |
≤ 100 °C | ||
solenoid valve |
≤ 50 °C | ||
Position indicator |
≤ 70 °C | ||
material |
Valve body and valve plate |
AISI 304 (1.4301) | |
bellows |
AISI 633 (AM350) | ||
seal |
Valve cover, valve plate |
Fluororubber (fluorinated elastomer)
Optional:FFKM
|
|
Installation location |
Any location |
||
solenoid valve |
24 VDC,1 W |
||
Position indicator: Contact rated value |
voltage |
24 VAC/DC | |
current |
≤0.5 A | ||
power |
Maximum 10 W |
||
| weight | 20 kg / 44.1 lbs | ||
Swiss VAT-09.1- High Vacuum Gate Valve with Protective Ring