Small plasma generator

NegotiableUpdate on 02/09

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Nature of the Manufacturer: Producers

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Overview

A small plasma generator is a specialized desktop plasma cleaning machine developed for laboratory needs. The processing chamber is made of cylindrical quartz glass, and the processor is a capacitive coupled external electrode type with no electrodes inside.

Product Details

Product Introduction:

Small plasma generatorUsing plasma to clean the surface of substances for purposes such as cleaning, activation, modification, etching, etc. It can be applied to precision cleaning in industries such as semiconductor, microelectronics, COG, LED process, device packaging, vacuum electronics, connectors and relays, activation of surfaces such as plastics, rubber, metals and ceramics, and life science experiments.

Small plasma generatorIt mainly consists of three parts: control unit, vacuum chamber, and vacuum pump. Through numerical control technology, various parameters can be easily adjusted. Because the cleaning process is carried out in the vacuum chamber, there is no need to dry after cleaning, and the operation is simple and efficient.

小型等离子发生器

Features: European and American discharge technology, professional discharge structure, scientifically simulated uniform plasma distribution, and uniform treatment effect.

Product application: Improve hydrophilicity, improve adhesion, surface micro etching, organic matter removal, oxide reduction, and enhance printing ink adhesion.

Product Parameters:

model	VPS-RF160
Plasma frequency	13.56MHz automatic impedance matching
工作真空度	10-100Pa
vacuum pump	Oil pump/dry pump (optional)
power	0-1000W adjustable
Material of the cavity	Imported grade 316L stainless steel/aviation aluminum alloy (optional)
Cavity Size	560(W)610(D)500(H)mm
Chamber volume	165L
Single layer effective processing area	W520mm x D520mm
Number of gas paths	2-channel gas, supporting oxygen, argon, nitrogen, hydrogen, etc. (corrosive gases need to be customized)
Processing layers	8th floor (customizable)
Control method	PLC+touch screen
power supply	AC380V,50/60Hz
Overall dimensions	950mm(L)×1300mm(W) ×1850 mm(H)