The semiconductor flow controller is a more compact gas mass flow controller product developed based on the industry's flow sensor chip, combined with high-speed sampling processing technology and digital compensation algorithms.
Semiconductor flow controllerMass Flow Controller is a more compact gas mass flow controller product developed based on the industry's flow sensor chip, combined with high-speed sampling processing technology and digital compensation algorithms. This product is equipped with an electromagnetic proportional valve, 316L stainless steel air circuit seat, high-precision microcomputer current chip, etc. The ultra-high integration enables the product to reduce its volume by half, making it better suited for installation sites with strict space requirements.
Product applications: semiconductor processing, analysis and environmental protection, combustion controllers, vacuum technology, surface treatment, food and pharmaceutical, chemical (petrochemical) and other process control, gas mixing ratio
Semiconductor flow controllerProduct features: insensitive to temperature and pressure/designed to be robust, can be installed at any position/zero stability
Ultra fast response speed
Good repeatability and reproducibility
Adopting LCD touch display and control
Equipped with proportional solenoid valve



















