Scanning/Transmission Electron Microscope

The JEOL JSM-7610FPlus scanning/transmission electron microscope adopts a semi immersed objective lens and a High Power Optics illumination system, providing stable high spatial resolution observation and analysis. In addition, it also has high scalability to meet various needs, such as using GENTLEBEAMTM mode for low acceleration voltage observation and sorting signals through r-filter.

　　Jeol jsm- 7610 fplusScanning/Transmission Electron MicroscopeAdopting a semi submerged objective lens and High Power Optics illumination system, providing stable high spatial resolution observation and analysis. In addition, it also has high scalability to meet various needs, such as using GENTLEBEAMTM mode for low acceleration voltage observation and sorting signals through r-filter. Immersion Schottky field emission electron gun can obtain probe current 10 times higher than traditional Schottky field emission electron gun (FEG), and aperture angle control mirror (ALC) can maintain small beam spot when probe current increases. The combination of the two can provide probe current of over 200 nA. The powerful High Power Optics system enables the continuous use of high-resolution small objective apertures for EDS analysis and EBSD analysis from high magnification images without the need for replacement. The aperture angle control mirror (ACL) is configured above the objective lens, automatically optimizing the angle of the objective lens aperture throughout the entire probe current range. Therefore, even if the probe current irradiating the sample is high, a very small electron beam spot can still be obtained compared to traditional methods.

　　Jeol jsm- 7610 fplusScanning/transmission electron microscope specifications:

1. Resolution of secondary electron image: 0.8nm (acceleration voltage 15kV), 1.0nm (acceleration voltage 1kV), 3.0nm for analysis (acceleration voltage 15kV, WD8mm, probe current 5nA)

2. Acceleration voltage: 0.1-30kV

3. Probe current: ranging from pA to 200nA

4. Electron gun: Immersion Schottky field emission electron gun

5. Lens system: condenser lens, aperture angle control lens, semi submerged objective lens

6. Sample stage: fully aligned angle measuring sample stage, 5-axis motor drive

7. Electronic detector series: high-level detector, r-filter built-in, low-level detector

8. Automatic functions: automatic focusing, automatic deblurring, automatic brightness/contrast adjustment

9. For image observation: LCD display

10. Screen size: 23 inch widescreen