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E-mail
762953489@qq.com
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Phone
15384324624
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Address
1712S79 Huarong Building, 178 Mintian Road, Fu'an Community, Futian Street, Futian District, Shenzhen
Product Categories
- Atmospheric pressure automated plasma machine
- Linear wide width plasma cleaning machine
- Plasma glue remover
- Microwave plasma cleaning machine
- Atmospheric pressure plasma cleaning machine
- Plasma etching and deposition equipment
- Atmospheric pressure plasma surface treatment machine
- Small experimental plasma cleaning machine
Shenzhen Shenguangda Technology Co., Ltd
Plasma processing system
NegotiableUpdate on 02/09
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Overview
The plasma processing system is a small desktop plasma cleaning machine specially developed for laboratory needs. The processing chamber is made of cylindrical quartz glass, and the processor is a capacitive coupled external electrode type with no electrodes inside.
Product Details
Product Introduction: VPS-RF05 is a small desktop vacuum plasma processing instrument. Its principle is to apply an electric field to a gas in a vacuum state (about 10-100pa). The gas will transform from a gaseous state to a plasma state (also known as the "fourth state" of matter) under the energy provided by the electric field. It contains a large number of active particles such as electrons, ions, photons, and various free radicals, which are more diverse and active than the active particles produced by typical chemical reactions, and are more likely to react with the surface of the material in contact. By utilizing these high-energy particles and active particles to undergo physical or chemical reactions with the material surface, the goal of changing the surface properties of the material can be achieved.
Plasma processing systemFeatures: Imported plasma power circuit technology and discharge structure ensure uniform distribution of plasma.
Plasma processing systemApplication: Remove surface organic matter, improve adhesion, enhance surface wettability, improve biocompatibility, increase surface energy, and improve surface roughness.
Product Parameters:
model |
VPS-RF05 |
frequency |
13.56MHz automatic impedance matching |
power |
0-200W continuously adjustable |
Material of the cavity |
Imported grade 316L stainless steel |
Chamber volume |
5L |
Cavity Size |
Φ 150 (diameter) × 280 (D) |
Effective processing area |
140（W）*250(D)mm |
Gas flow controller |
MFC Mass Flow Controller |
Number of gas paths |
2-channel gas, commonly used O2, Ar2, N2, H2, etc. (corrosive gases need to be customized) |
Vacuum measurement system |
Pirani vacuum silicon tube |
ultimate vacuum |
1Pa |
Control method |
4.3-inch touch screen+PLC |
vacuum pump |
Oil pump/dry pump (optional) |
power supply |
AC220V/50Hz |
Overall dimensions |
550mm(L)×450mm(W) ×500 mm(H) |
