- Phone
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Address
Yaojiayuan Xili, Chaoyang District, Beijing
Beijing Zhongke Aobo Technology Co., Ltd
Yaojiayuan Xili, Chaoyang District, Beijing
Plasma cleaning machineAs a micro solid surface treatment device, it is a new surface treatment solution. Plasma is a state of matter, also known as the fourth state of matter. Applying sufficient energy to a gas to ionize it becomes a plasma state. plasma“activity”The components include: ions, electrons, active groups, excited state nuclides (metastable), photons, etc.Plasma cleaning machineIt is to treat the surface of the sample by utilizing the properties of these active components, in order to achieve cleaning and other purposes.
Mainly used in semiconductors, coating processesPCBProcessPCBBefore process and component packagingCOGPrecision cleaning in industries such as vacuum electronics, connectors, and relays, activation of surfaces such as plastics, rubber, metals, and ceramics, and life science experiments.
The cleaning machine is equipped with a high-purity quartz chamber and adopts a new electrode structure design and solid-state power supply technology, which increases its effective volume, makes it easy to match under different vacuum gas environments, and has stable control frequency. The vacuum chamber door has an observation window, which allows for a visual representation of the object processing process. Its RF power supply and control are assembled in one chassis, reducing space occupation and making it easier to operate and place. Compared with large cleaning machines, the detection and control functions can be set up on one panel, making it particularly suitable for scientific experiment sample cleaning and teaching.
Device Model |
Z5KQX |
S2DQX |
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Control method |
7Inch touch screen human-machine interface |
7Inch touch screen human-machine interface |
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power supply |
AC220V(AC110Voptional) |
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operating current |
The working current of the whole machine is not greater than3.5A(Excluding vacuum pump) |
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RF power supply power |
500W |
150W |
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matching method |
auto-matching |
manual matching |
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Cleaning frequency |
40KHz |
13.56MHz |
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coupling method |
Capacitive coupling |
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Working vacuum |
≤30Pa |
≤50Pa |
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Material of the cavity |
high-purity quartz |
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cavity volume |
5L(inner diameterΦ152mmXdepth280mm) |
2L(inner diameterΦ110mmXdepth220mm) |
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Observation window inner diameter |
Φ50 |
Φ50 |
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gas flow rate |
0-50ml/min(Thermal mass flow sensor)X2A) |
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Vacuum gauge range |
1E5Pato1E-1Pa(Pirani vacuum gauge) |
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process control |
Auto Switch |
Manual matching and automatic switching |
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cleaning time |
automatic switch |
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Opening method |
Hinged side open flange |
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Overall dimensions |
450*450*250mm |
450*450*360mm |
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Vacuum chamber temperature |
less than65°C |
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cooling method |
forced air cooling |
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standard configuration |
KF16vacuum tube1Mi,kf16clamp2A stainless steel mesh box1One power cord and one manual. |
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