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5th Floor C, Building 1, South China City, Pinghu Street, Longgang District, Shenzhen
Shenzhen Wilkes Optoelectronics Co., Ltd
5th Floor C, Building 1, South China City, Pinghu Street, Longgang District, Shenzhen
Optotune large angle micro galvanometer, with a maximum ± 25 ° super large deflection angle and 4 µ rad angle resolution
Optotune large angle micro galvanometer is an optical device that achieves beam pointing adjustment by precisely controlling the reflection angle,Beam Steering DeviceUsing voice coil motor orMEMSThe technology achieves millisecond level response and precise deflection of the beam in a two-dimensional plane through a laser deflector. This technology is based on the precise control of the optical path adjustment module, which can perform sub milliradian level fine turning on the incident beam. The reflector serves as the core optical element, and the angle of the mirror surface is changed to achieve the precise turning of the beam2DBeam deflection is suitable for industrial applications such as laser processing, optical communication, and LiDAR that require precise control of beam direction.Optotune beam steering mirror, large angle micro galvanometer mirror
Features of large angle micro galvanometer products:
-Supports two-dimensional beam modulation, enabling precise deflection and flexible control of beam direction
-Equipped with micro arc angular resolution to meet the requirements of high-precision optical and imaging systems
-Fast deflection response speed, suitable for dynamic scanning and high-speed imaging applications
-Compact structure, lightweight, easy to integrate into various optical modules and equipment
-High stability and repeatability, suitable for industrial environments with long-term continuous operation
-Reflective optical design, without introducing dispersion, suitable for multi wavelength and laser systems
Product parameter table of beam steering mirror:
parameter item |
MR-15-30 |
MR-13×15-30 |
MR-8-30 |
FMR-20 |
Product Type |
Large angle closed-loop micro galvanometer |
Precision large angle galvanometer |
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Number of deflection axes |
2 Axis(X / Y) |
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Mirror size |
Ø15 mm |
13 × 15 mm |
Ø10 mm |
20 × 20 mm |
Mechanical deflection angle (half angle) |
±25° / ±25° |
±7° / ±7° |
±10° / ±10° |
0.2°static/ 1°(Dynamic) |
angular resolution |
22 µrad |
10 µrad |
10 µrad |
4 µrad |
Repetitive positioning accuracy(RMS) |
40 µrad |
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Full bandwidth frequency |
20 Hz |
250 Hz |
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Dimensions (diameter)×Height) |
30 × 14.5 mm |
30 × 14.5 mm |
30 × 14.5 mm |
51 × 12 mm |
position feedback |
Yes (closed loop) |
Yes (closed loop) |
Yes (closed loop) |
nothing |
working method |
reflective |
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Typical advantages |
Large angle scanning |
Compact rectangular mirror |
miniaturization |
ultra-high resolution |
Typical Applications |
Field of view expansion360°vision |
AOIchoice |
Compact optical system |
Precision scanning and measurement |
The MR-15-30 model, as a representative of large angle scanning, is equipped withØ15mmCircular reflector with mechanical deflection angle of ±25°/±25The wide range of degrees, with an angular resolution of22MradFull bandwidth frequency20Hz. Its30×14.5mmThe compact size combined with position feedback closed-loop system is particularly suitable for field of view expansion and360Panoramic vision application, with repeated positioning accuracy of up to40Mrad RMSEnsure stability during long-term operation.
MR-13×15-30The model adopts a unique13×15mmRectangular mirror design, providing ± while maintaining the same external dimensions7°/±7Deviation angle, angle resolution increased to10MradThis compact rectangular mirror design is particularly suitable forAOIEfficient beam control is achieved in space limited scenarios of optical detection systems.
The MR-8-30 model features miniaturization and configurationØ10mmReflective mirror, providing ±10°/±10Deviation angle, also possessing10MradAngle resolution and closed-loop feedback. Its miniaturized design makes it an ideal choice for compact optical systems, performing well in medical devices and portable instruments.
The FMR-20 precision model is designed for ultra-high precision applications and adopts20×20mmSquare mirror surface, static deflection angle0.2°, dynamic deflection angle1°, with astonishing angular resolution4MradWith a full bandwidth of up to250HzAlthough there is no position feedback, its ultra-high resolution characteristics make it irreplaceable in the fields of precision scanning and optical metrology.
All products in the series adopt reflective optical design, do not introduce dispersion, and support multi wavelength and laser systems. The compact structure and light weight make it easy to integrate into various optical modules. The micro arc angular resolution meets the requirements of high-precision optical and imaging systems, and the deflection response speed is fast, suitable for dynamic scanning and high-speed imaging applications. The high stability and repeatability ensure long-term continuous and reliable operation in industrial environments.
Typical application scenarios of precision large angle galvanometers:
In the field of precision optical control,OptotuneThe large angle micro galvanometer has become a beam pointing regulator due to its performance. As an advanced precision turning mirror, this large angle micro galvanometer achieves precise positioning of the precision large angle galvanometer through an innovative closed-loop control system. thatBeam Steering DeviceBy adopting unique electromagnetic drive technology2DThe beam turning mirror achieves rapid deflection on a two-dimensional plane.OptotuneThe closed-loop feedback mechanism of the large angle closed-loop micro mirror ensures the high stability of the precision large angle mirror, enabling it to maintain excellent performance under various environmental conditions. This beam pointing regulator demonstrates the reliability of fine turning mirrors in industrial testing, and the wide angle range of large angle micro mirrors meets diverse application needs. In practical applications,Beam Steering DeviceThe fast response feature enables2DThe beam turning mirror has become an ideal choice for dynamic scanning,OptotuneThe large angle closed-loop micro galvanometer provides a reliable solution for precision alignment.
This product is widely used in machine vision, laser scanning, and precision optical systems. In the field of machine vision, it can be used for field of view expansion and region selection, achieving large-scale imaging and local high-resolution detection; In laser applications, it is suitable for scenarios such as beam pointing control, dynamic scanning, and swing welding; It can also be used for optical path adjustment in 3D imaging, ToF systems, and scientific research experiments, helping the system improve flexibility and overall performance while maintaining a compact structure.Optotune beam steering mirror, large angle micro galvanometer mirror