Optical 3D surface profilometer

Optical 3D Surface Proformer Product Model: SuperView W1 Product Name: Optical 3D Surface Proformer Optical Zoom: 1, (0.75, 0.5 optional) Imaging System: 10241024, (20482048 optional) Interference Objective: 10, (2.5, 5, 20, 50, 100 optional) Movement Range: 140110mm Control Method: Electric Z-axis Travel: 100mm Z-axis Scanning Range: 10mm Z-axis Resolution: 0.1nm Measurable Sample Reflectivity: 0.5% -100% Horizontal Adjustment: 5, Manual Roughness RMS Repeatability: 0.005nm Main Features: Non contact non-destructive testing, one click analysis, fast and efficient

SuperView W1Optical 3D surface profilometerIt is a detection instrument used for sub nanometer level measurement of various precision devices and material surfaces. It is an optical detection instrument that uses white light interference technology as the principle, combined with precision Z-direction scanning module, 3D modeling algorithm, etc. to perform non-contact scanning of the device surface and establish surface 3D images. The system software processes and analyzes the 3D images of the device surface, and obtains 2D and 3D parameters reflecting the surface quality of the device, thereby achieving 3D measurement of the device surface morphology.

SuperView W1 optical 3D surface profilometer can be widely used in semiconductor manufacturing and packaging process testing, 3C electronic glass screens and their precision accessories, optical processing, micro nano materials and manufacturing, automotive parts, MEMS devices and other ultra precision processing industries, as well as aerospace, defense industry, research institutes and other fields. Can measure surfaces of various objects ranging from ultra smooth to rough, low reflectivity to high reflectivity, and workpieces ranging from nanometer to micrometer levelsProvide basis for roughness, flatness, micro geometric contour, curvature, etcISO/ASME/EUR/GBT four major domestic and international standardsTotal standards300Kinds2D、3DParameters serve as evaluation criteria.

IIPRODUCT FUNCTION

1) The measurement and analysis software for integrated operation does not require switching interfaces. The configuration parameters are pre-set before measurement, and the software automatically collects measurement data and provides data report export function, which can quickly achieve batch measurement function.

2) Automatic multi area measurement function, batch measurement, automatic focusing, automatic brightness adjustment and other automation functions are provided in the measurement.

3) Provide splicing measurement function during measurement.

4) In the analysis, the data processing functions of four modules are provided, namely, position adjustment, correction, filtering, and extraction. The position adjustment includes image leveling, mirroring, and other functions; Correction includes functions such as spatial filtering, contouring, and peak denoising; Filtering includes functions such as removing external shapes, standard filtering, and filtering spectra; Extraction includes functions such as extracting regions and extracting profiles.

5) The analysis provides five major analysis functions, including roughness analysis, geometric contour analysis, structural analysis, frequency analysis, and functional analysis. Among them, roughness analysis includes full parameter analysis functions based on international standards such as ISO4287 line roughness, ISO25178 surface roughness, ISO12781 flatness, etc; Geometric contour analysis includes measurement of features such as step height, distance, angle, and curvature, as well as evaluation of straightness, roundness, and positional tolerances; Structural analysis includes pore volume and valley depth, etc; Frequency analysis includes functions such as texture direction and spectral analysis; Functional analysis includes functions such as SK parameters and volume parameters.

6) Provide auxiliary analysis functions such as one click analysis and multi file analysis in the analysis, set analysis templates, and combine the automatic measurement and batch measurement functions provided in the measurement to achieve small size analysisThe function of batch measurement of precision components and direct acquisition of analytical data.

3、 Application Fields

Measure and analyze surface morphology features such as flatness, roughness, waviness, surface contour, surface defects, wear, corrosion, pore gaps, step height, bending deformation, and processing of various products, components, and materials.

Application example:

semiconductor. Polishing silicon wafers, thinning silicon wafers, wafer ICs
3C Electronics Sapphire glass roughness, defects in mobile phone metal shell molds, and height differences in mobile phone ink screens
Ultra precision machining optical lens	Precision machining Engine blades
Precision machining Pyramid shaped diamond magnetic head	Standard sample block Single engraved step, multi engraved roughness