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Address
Room 613, No. 5 Fengti North Road, Fengtai District, Beijing
Dejing Technology (Beijing) Co., Ltd
Room 613, No. 5 Fengti North Road, Fengtai District, Beijing
1、 Technical parameters:
3.1 Whole machine: integrated, including air compression system, purification system, storage system, and nitrogen preparation system
3.1.1 Nitrogen flow rate 30L/min
3.1.2 Purity 99%
3.1.3 The nitrogen pressure is 80psi, and the pressure can be adjusted to meet the gas supply pressure requirements of the front-end equipment
3.1.4 PAEs (Phthalates): None
3.1.5 Pressure dew point: < -45 ℃
3.1.6 Operating environment temperature: 5-35 ℃
3.1.7 Operating environment humidity: 0~80%, no condensation
3.1.8 Voltage 220V, Power 1.6KW
3.1.9 Dimensions (length x width x height mm): 360 x 600 x 650
3.2 Air Compression System: Built in oil-free air compressor, dual air compressor technology,
3.3 Purification system:
3.3.1 Adopting a 4-stage ultra precision filtration system
3.3.2 Filtration accuracy: particles< 0.01um@0.003mg /m3
3.3.3 High throughput design, air processing capacity not less than 400L/min
3.3.4 The filtering system is equipped with intelligent blockage alarm function to avoid losses caused by failure
3.3.5 Adopt a high-power condensation water removal system to ensure a dry air flow is obtained