Negative pressure switching unit

No need for vacuum breaking valve
By vacuum detachment without positive pressure, there is no need to take measures to prevent tiny chips from being blown away.
No need to adjust the destructive pressure, flow rate, and timing in a cumbersome manner.
Without using a vacuum breaker valve, it achieves precise simplification.

Minimize Space Occupation
Compared with previous damaged units, the installation area has been reduced by 44% and the weight has been reduced by 53%, making it the most suitable for miniaturization in manufacturing equipment.
Even in extremely small spaces, it can be installed with higher degrees of freedom in device design.
By being lightweight, it is easy to install on the movable part of the device.

Can be equipped with pressure sensors
The unit is equipped with a vacuum pressure sensor, which is more compact in appearance.
Negative pressure detection also achieves space saving.
Use U-shaped locking pins to fix the pressure sensor and improve maintainability.

Can install vacuum filters
No filter needs to be installed during the piping process.
The vacuum filter adopts quick plug replacement.