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Xikaili (China) Co., Ltd
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Module integrated valve

NegotiableUpdate on 04/25
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Overview

Each connected valve is equipped with two three-way valves, reducing installation space. The extraction position of the intake and exhaust ports can be selected, which improves the freedom of piping. 【 Applicable cylinder diameter: Φ 4~Φ 16 】 Industry semiconductor manufacturing process (pre process) Chemical liquid supply equipment components Chemical gas supply equipment components Nitrogen cleaning related components

Product Details

Miniaturization
When installed directly, it is 34mm high.
When installing DIN rails, the height is 39mm.
It can also be installed in narrow spaces.

【 Panel Installation 】
The extraction position of the intake and exhaust ports can be selected, which improves the freedom of piping.

Flat cable, D-Sub connector
The direction for removing the connector can be selected from above or horizontally.

model name Installation method Pipe diameter notes
N3Q0660 Valve module unit DIN rail installation method Quick plug connectors with diameters of 1.8, 3, 4, and M5
MN3Q0660 Module integrated valve DIN rail installation method Quick plug connectors with diameters of 1.8, 3, 4, and M5
MT3Q0660 Module integrated valve Direct installation method Quick plug connectors with diameters of 1.8, 3, 4, and M5