MEMS and Nanotechnology

MEMS and Nanotechnology

Micro electromechanical systems (MEMS) are now used in many application fields, including pressure and acceleration sensors, microcrystalline lens display devices, and microfluidic pumps. MEMS devices make full use of manufacturing technologies used in the integrated circuit industry to create mechanical components such as gears, diaphragms, and bonding beams. Accurately measuring all these components is crucial for meeting the mass production requirements of low-cost and high-quality MEMS devices.

measurement

roughness
By accurately measuring the roughness inside MEMS devices, surface interactions can be controlled - whether these interactions are between solids in micro gear systems or between solids and liquids in microfluidic pumps.

step height
Monitoring the step height of MEMS devices is an important performance indicator. The height of the steps, together with the lateral dimension information, can provide an effective approximation of the mass, which can affect the fundamental oscillation frequency of individual components in the device.

horizontal dimension
When qualitatively analyzing micro gears and fluid systems, lateral dimensions are particularly important. Accurate measurement of volume, surface area, and important dimensions such as beam width can help control the performance of the final device.