Electronic Probe Series

The Grand EPMA was born Equipped with the most advanced field emission electron optical system Maximize the performance of Shimadzu EPMA analysis A cutting-edge field emission electron optical system with unparalleled spatial resolution under various beam conditions, ranging from SEM observation conditions to the 1 μ A level. Combining Shimadzu's traditional high-performance X-ray spectrometer to maximize analytical performance. The undisputed 'The Grand EPMA', the highest level of EPMA is born!

Unparalleled and excellent spatial resolution

Proud of the No.1 secondary electron image resolution through the use of analytical conditional beam current. When the acceleration voltage is 10kV, 20nm@10nA // 50nm@100nA / 150nm@1 μA）。 Compared with the results of the original electron gun (CeB6, tungsten filament), it is clear at a glance.

Due to the ability to obtain images with the same resolution as the original electron gun using a larger beam, ultra-high sensitivity X-ray analysis can be performed. More noteworthy is the SEM image at a beam current of 1 μ A. It can obtain a beam current of over 1 μ A and can be compressed to such a fine size as EPMA-8050G.

Comparison of Characteristics of Electron Beams Generated by Various Electron Guns (Acceleration Voltage 10kV)

Analysis of ultra-high sensitivity for large beam current

Field emission type SEM and EPMA can achieve high beam currents (up to 3 μ A at an acceleration voltage of 30kV) that other instruments cannot achieve. A qualitative leap has been achieved in the detection sensitivity of trace elements, making the visualization of the distribution of trace element components in elemental surface analysis a reality. Moreover, there is no need to replace the objective aperture within all beam ranges, and there is no need to worry about axis alignment, achieving highly automated analysis.

The three images on the surface are the results of surface analysis of approximately 1% Si in stainless steel under different beam currents. The larger the beam current, the smaller the deviation, and the clearer it is to confirm the range containing Si.

Analysis conditions: Acceleration voltage of 10kV, integration time of 50msec. The analysis takes about 1 hour.

Up to 5 channels of high-performance 4-inch X-ray spectrometer can be installed simultaneously

The X-ray extraction angle determines the analysis performance, with 52.5 ° being superior

The less absorption of X-rays, the higher the sensitivity.	High X-ray extraction angle can reduce the impact of absorption and analyze foreign objects at the bottom and inside deep holes.

An example of analyzing foreign objects in deep holes. The lower left shows the distribution of iron (Fe), and the lower right shows the distribution of titanium (Ti). Through the high extraction angle of EPMA-8050G, even samples with significantly different surface irregularities can be analyzed with high precision.

The spectral crystal adopts a fully focused Johnson type crystal.

Adhering to the crystal processing and preparation technology based on Shimadzu's R&D experience, we ensure the provision of high sensitivity and high resolution spectral crystals. Johanson type spectroscopic crystals are fully focused crystals with no aberrations.

Up to 5 channels of a 4-inch spectrometer with high sensitivity and resolution can be installed simultaneously.

The Roland circle diameter of X-ray spectrometer is one of the crucial factors affecting the performance of EPMA analysis. For every 1 inch increase in the radius of the Roland circle, the detection sensitivity decreases by more than 30%. Shimadzu EPMA can accommodate up to

All analysis operations are simple and easy to understand

The advanced operability that can be achieved with just one mouse, the pursuit of a user-friendly interface that is easy to understand, and the inclusion of multiple new features such as navigation mode have made "simple and easy to understand operations" a reality. Both beginners and expert level users can perform proficient operation analysis.

From importing samples to generating analysis reports, the operation is convenient.
Even for first-time use, sample positioning SEM observation can be easily performed.
Unparalleled controllability greatly improves the efficiency of analytical preparation work.
Visually pursuing a user-friendly interface that is easy to understand.
Equipped with navigation mode, it automatically guides until an analysis report is generated.