Double furnace sliding PECVD system&circulating glove box OTF-1200X-PESDFG-50

NegotiableUpdate on 01/09

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Overview

Double furnace sliding PECVD system&circulating glove box OTF-1200X-PESDFG-50

Product Details

OTF-1200X-PESDFG-50 is a dual furnace sliding PECVD system connected to a circulating glove box. In this device, the quartz furnace tube is connected to a circulating glove box, allowing customers to directly transfer the sample into the glove box under atmospheric protection after the sample is made by CVD method. The furnace body adopts a sliding type, which can quickly heat and cool the sample during laboratory testing. This instrument is particularly suitable for the exploration and research of new generation nanomaterials and two-dimensional crystal materials.

Technical Parameter
Furnace structure(Click on the image to view detailed information)	Two furnace bodies are placed on a sliding rail, and the effect of rapid heating and cooling of the sample is achieved by sliding the furnace bodies Continuous operating temperature: 1100 ℃ Both furnaces can be equipped with 30 temperature rise and fall programs
Plasma RF power supply	● Output frequency: 13.56 MHz ±0.005% Maximum RF power: 500W ● Matching: Automatic matching ● Noise:< 50 dB. ● Cooling: Air cooling ● Input power supply: 208-240VAC, single-phase, 50/60Hz
vacuum system	● Adopting VRD-16 dual rotary vacuum pump, with a maximum vacuum of 10E-3 Torr KFD25 quick connect, stainless steel corrugated pipe, manual baffle valve and flange, connected to vacuum pump The vacuum inside the tube can reach 10E-2 Torr
Mass flow meter mixing system	Four precision mass flow meters (accuracy 1.5%): digital display, automatic control ● MFC1 range: 0~100 sccm MFC2 and 3: 0~200 sccm MFC4 range: 0~500 sccm A gas mixing tank with a waste liquid outlet at the bottom Four stainless steel needle valves are installed on the left side of the gas supply system, which can manually control four types of gases ● Air intake: 4 1/4NPS ● Air outlet: 4 1/4NPS ● Using PLC to control the flow meter, controlled through a touch screen Optional purchase of gas-liquid mixing device for CVD system
Furnace tube&sealing flange	High purity quartz tube, size 50mm O.D x 44mm I.D x 1800 mm L Equipped with a set of stainless steel sealing flanges and vacuum gauges installed on them
Anti corrosion vacuum gauge	Input power supply 24V, 1A DC (equipped with a voltage converter) Measurement range: 3.8x10-5-1125 Torr ● Data display digital display (screen size is 20x14mm), with data display unit in torr ● KF16 connector Product size 46mm × 28mm × 126mm (L x W x H)
Circular glove box	Glove box size: 780mm (L) x 700mm (W) x 650mm (H) Equipped with a water removal system: maintaining a water content of<2 ppm A vacuum flange is located on the left side of the glove box and connected to the quartz tube of the PECVD system
Warranty period	One year warranty period, lifetime maintenance (excluding furnace tubes, heating elements, and sealing rings)
Certificate	● CE certification ●All electrical components (>24V) are certified by UL/MET/CSA