CYG513 Thin Pressure Sensor

The CYG513 thin pressure sensor is designed specifically for aerodynamic research and wind tunnel test model surface pressure field distribution. It is particularly suitable for applications where the model is very thin and it is not possible to install micro probe type sensors with holes. Directly mount the extremely thin sensor or dig a shallow pit to bury it flat and install it on the surface of the model. Its ultra-thin specialized flexible leads can be directly attached to the surface of the model. Therefore, it basically does not affect the measured flow field.

The pressure sensitive components of CYG513 are designed and manufactured using advanced MEMS technology. The silicon piezoresistive pressure sensitive element with three-dimensional integration and double-sided processing has excellent linear accuracy. The high consistency of the Wheatstone strain bridge produced by ion implantation and fine lithography technology makes it have very small temperature drift. The micro mechanical processing of the body, precision anisotropic corrosion, and silicon glass anode bonding technology make the silicon thin film force sensitive structure highly sensitive, stable, dynamic, and thin. The total thickness of the integrated force sensitive structure and substrate reinforcement structure is only 0.9mm, which is beneficial for obtaining thin sensors with thinner final dimensions.

CYG513 is a gauge pressure measurement mode with standard pressure ranges of 2, 5, 10, 25, 40, 60, 100, 160, 250, 400, 600, and 1000 kPa

CYG513 has a thin circular buckle design. The minimum diameter is ф 10mm and the thickness is 4 mm. The reference pressure can be led out through the back opening (513G) or through a capillary tube at the side lead part (513D). The lead out wire is a 5-wire flexible wire with a length of 1m. At the end of 1m, a bridge compensation balancer made of PCB board is connected. The thickness of the flexible wire is 0.15 mm and the width is 4 mm. (It can also be led out through a Φ 2.5mm multi-core shielded cable.)

CYG513 has excellent medium compatibility and can also be used for hydrodynamic applications due to its use of sensitive components for reverse pressure bearing. It has a wide operating temperature range and excellent dynamic frequency response characteristics, and can be used in frequency bands ranging from low to zero to tens of thousands of hertz.

1. Performance indicator parameters

2. Full range output: minimum value 30mv, typical value 80mv, maximum value 130mv

3. Input/output impedance: minimum value 3 k Ω, typical value 5 k Ω, maximum value 7 k Ω

4. Input working current: 1mA (constant current source)

5. Working temperature range: -55 ℃~120 ℃

6. Compensation temperature range: -10 ℃ to 80 ℃

7. Overload capacity: 200% of rated range

8. Acceleration sensitivity:<0.001% FS/g

9. Outline dimension diagram: