CYG511 Thin Pressure Sensor

The CYG511 thin pressure sensor is designed specifically for aerodynamic research and wind tunnel test model surface pressure field distribution. It is particularly suitable for applications where the model is very thin and it is not possible to install micro probe type sensors with holes. Directly mount the extremely thin sensor or dig a shallow pit to bury it flat and install it on the surface of the model. Its ultra-thin specialized flexible leads can be directly attached to the surface of the model. Therefore, it basically does not affect the measured flow field.

The pressure sensitive components of CYG511 are designed and manufactured using advanced MEMS technology. The silicon piezoresistive pressure sensitive element with three-dimensional integration and double-sided processing has excellent linear accuracy. The high consistency of the Wheatstone strain bridge produced by ion implantation and fine lithography technology makes it have very small temperature drift. The micro mechanical processing, precision anisotropic etching, and silicon direct bonding technology make the silicon thin film force sensitive structure highly sensitive, stable, and dynamically capable, while also having ultra-thin thickness. The total thickness of its integrated force sensitive structure and substrate reinforcement structure is only 0.6mm, which is more conducive to obtaining thinner final size thin sensors.

CYG511 is an absolute pressure measurement mode with standard pressure ranges of 100, 160, 250, 400, 600, 1000, 1600, 2500, and 4000kpa.

CYG511 has a thin circular buckle design. The nominal diameter is ф 8 mm, the thickness is 2.2 mm, and the lead wire is a 5-wire flexible wire with a length of 1m. At the end of 1m, a bridge compensation balancer made of PCB board is connected. The thickness of the flexible wire is 0.15 mm and the width is 4 mm.

CYG511 is suitable for dry gases that are completely non corrosive and non-conductive, as it uses sensitive components to withstand pressure from the front. It has a fairly wide operating temperature range and excellent dynamic frequency response characteristics, and can be used in frequency bands ranging from low to zero and up to several kilohertz. If the medium factors are complex and the water content is high, CYG511S covered with silicone gel can be used to protect the surface and electrode (silicone gel will reduce its dynamic frequency response performance). The product CYG511P, which is covered and protected by thin film organic materials, has less dynamic frequency response loss due to the thickness of the protective film being on the order of um, a longer special period, and a higher cost increase.

1. Performance indicator parameters:

2. Full range output: minimum value 30mv, typical value 80mv, maximum value 130mv

3. Input/output impedance: minimum value 3 k Ω, typical value 5 k Ω, maximum value 7 k Ω

4. Input working current: 1mA (constant current source)

5. Working temperature range: -55 ℃ to+120 ℃

6. Compensation temperature range: -10 ℃ to+80 ℃

7. Overload capacity: 200% of rated range

8. Acceleration sensitivity:<0.001% FS/g

9. Outline dimension diagram: