CYG503、 504 Miniature Pressure Sensor

The CYG503 miniature pressure sensor with a nominal outer diameter of 3mm is designed specifically for aerodynamic research experiments that require small installation size, no disturbance to the flow field, and excellent dynamic response for measuring dynamic pressure distribution. Applied to the measurement of aerodynamic performance such as engine intake pressure distortion, surge, etc.

The pressure sensitive components of CYG503 are designed and manufactured using advanced MEMS (Miro Electronic Mechanical Systems) technology. The silicon piezoresistive pressure sensitive element with three-dimensional integration and double-sided processing has excellent linear accuracy. The high consistency of the Wheatstone strain bridge produced by ion implantation and fine lithography technology makes it have very small temperature drift. The silicon thin film force sensitive structure formed by precision anisotropic corrosion has high pressure sensitivity and a radial scale as small as 1.5mm or less. The advanced miniaturized pressure sensitive chip adopts stress free packaging technology, sealed and packaged in a specially designed micro mounting base and stainless steel capillary tube. The reference pressure chamber of the absolute pressure sensor is a vacuum chamber sealed on the back of the chip, while the reference pressure chamber of the gauge pressure sensor is connected to the atmosphere through a thinner stainless steel capillary tube drawn from the back. For the convenience of users to obtain stable pressure reference, a thin nylon tube is used to guide it to a stable pressure point.

The CYG503A absolute pressure miniature pressure sensor is probe shaped, with a standard outer diameter of 3.5mm and a length of 18mm. The specially designed short column CYG503AS shortens the length to 12mm. The optional ranges are 100, 160, 250, 400, 600, 1000, 1600, 2500, and 4000kpa absolute pressure.

The CYG503G gauge pressure miniature pressure sensor is probe shaped, with a standard outer diameter of 3.5mm and a length of 18mm. The back pressure lead out capillary is 12mm long. The optional ranges are 160, 250, 400, 600, 1000, 1600, and 2500 kPa gauge pressure.

The design and production patent of CYG503 has been granted national invention patent authorization, with patent number:. 3.

CYG504 miniature bolt mounted pressure sensor is a derivative of CYG503 designed to meet the needs of some users, with both absolute and gauge pressures available. Its external dimensions are shown in the attached diagram.

CYG503、 The 504 type sensor is only suitable for dry gases with non corrosive and non-conductive media, as it uses sensitive components to withstand pressure from the front. But it has a fairly wide operating temperature range and very good dynamic frequency response. The dynamic frequency response that can be used ranges from zero frequency to tens of kilohertz. Adding coating protection to the surface can improve the applicability of the medium, but at the cost of sacrificing frequency response characteristics.

1. Performance indicator parameters

2. Full range output: minimum value 30mv, typical value 80mv, maximum value 130mv

3. Input/output impedance: minimum value 3 k Ω, typical value 5 k Ω, maximum value 7 k Ω

4. Input working current: 1.5mA (gauge type) 1mA (absolute type) (constant current source)

5. Working temperature range: -55 ℃ to+120 ℃

6. Compensation temperature range: -10 ℃ to+80 ℃

7. Overload capacity: 200% of rated range

8. Acceleration sensitivity:<0.001% FS/g

9. Outline dimension diagram: