CYG502 Ultra Micro Pressure Sensor

The CYG502 ultra miniature pressure sensor with a nominal outer diameter of 2mm is designed specifically for applications that require smaller installation sizes in fluid mechanics experiments. It is currently the smallest pressure sensor among the products launched by our company.

The pressure sensitive components of CYG502 are designed and manufactured using advanced MEMS (Miro Electronic Mechanical Systems) technology. Silicon piezoresistive pressure sensitive components with three-dimensional integration and double-sided processing have excellent linear accuracy. The high consistency of the Wheatstone strain bridge produced by ion implantation and fine lithography technology results in minimal temperature drift. By adopting silicon silicon direct bonding technology and inverted V-groove design, the optimization of the available chip film size has been achieved, reducing the entire chip size to 1 × 1mm while still maintaining an output sensitivity range of 100kpa, making a key breakthrough in the implementation of ultra micro sensors.

Changing the traditional design of silicon glass bonding to silicon silicon bonding has improved the thermal matching effect and reduced the zero position instability caused by stress.

At present, there are absolute pressure measurement mode products on the market, and gauge pressure types are under development.

The CYG502A absolute pressure ultra miniature pressure sensor is probe shaped, with a standard outer diameter of Ø 2.15mm and a length of 18mm. The sensor has optional ranges of 100, 160, 250, 400, 600, 1000, 1600, 2500, and 4000kpa absolute pressure.

The sensing element of CYG502A absolute pressure sensor is under pressure on the front. Therefore, it is only applicable to dry gases with non corrosive and non-conductive media. It has a relatively wide working temperature range, reaching -55 ℃ to+120 ℃, and also has excellent high-frequency dynamic characteristics. The natural frequency of its lowest range sensitive components is greater than 200kHz, and the rise time is sub microseconds.

1. Performance indicator parameters

2. Full range output: minimum value 30mv, typical value 80mv, maximum value 130mv

3. Input/output impedance: minimum value 3 k Ω, typical value 5 k Ω, maximum value 7 k Ω

4. Input working current: 1.5mA (gauge type) 1mA (absolute type) (constant current source)

5. Working temperature range: -55 ℃ to+120 ℃

6. Compensation temperature range: -10 ℃ to+80 ℃

7. Overload capacity: 200% of rated range

8. Acceleration sensitivity:<0.001% FS/g

9. Outline dimension drawing: CYG502A