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Phone
13824460726
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Address
Room 901, No. 12 Huaxin 1st Street, Haizhu District, Guangzhou City
Guangzhou Kefu Instrument Co., Ltd
13824460726
Room 901, No. 12 Huaxin 1st Street, Haizhu District, Guangzhou City

Automegasamdri-934,
Product Features:
The newly configured dedicated "slow charging" control provides ideal CO2 fluid dynamics to the sample chamber, protecting most fragile samples;
The PURGE filter device is externally configured to protect the sample, making it easy to replace and maintain in the future;
Adopting the exclusive patented 'Vortex Swirl' non mechanical stirring, PURGE achieves complete and non damaging sample;
Efficient internal enclosed cooling circulation system can quickly cool the temperature of the chamber and shorten the operating time;
Built in SOTER condenser, separates waste ethanol and exhaust gas, eliminates exhaust noise;
The unique sample chamber filling block can change the diameter of the sample chamber, reduce the consumption and processing time of liquid carbon dioxide, and is compatible with the processing of wafers of different sizes;
Internal filtration system filters liquid carbon dioxide flowing into the sample chamber, with a minimum particle size of 0.08 μ m;
One run can process 5 4-inch wafers, changing the size of the sample chamber. Each run can also process 3-inch, 2-inch wafers, and 10mm square wafers separately;
Standard configuration includes one 4-inch, 3-inch, 2-inch wafer sample holder and one 10mm square crystal sample holder compatible with Teflon;
Vertical sample chamber with illumination inside, sample chamber lid with observation window;
Bright LCD touchscreen control;
Built in factory automatic running program and the ability to create and save personalized programs;
All internal surfaces are suitable for CO2, acetone, and ultra pure ethanol;
Parameters that can be repeatedly set to ensure the repeatability of the results;
Integrate automatic temperature control and static pressure control modules to ensure safe and automatic operation;
Cleanroom and anti-static compatible design;
Product Specifications
External dimensions: Width 19.8 "(50.3 cm) x Depth 31.7" (80.6 cm) x Height 44.5 "(113.0 cm);
Installation footprint size: width 27 "(68.6 cm) x depth 38" (96.5 cm);
Sample chamber size: inner diameter 4.5 "x depth 1.25", sample chamber volume: 326 ml;
The flow rate of LCO2 is controlled by a micro metering valve with a vernier caliper;
Standard accessories:
High pressure stainless steel LCO2 tube (lined with Teflon) 3 meters long;
Double T-shaped filtration device, capable of double filtering small particles. The filtration device can be pre connected to LCO2 pipes for easy installation;
Installation tools;
Anti static exhaust pipe, used for exhaust during PURGE/VENT/BELED and COOL;
Three O-rings in the sample room, one LED lighting fixture in the sample room, and two 3A and 8A fuses each;
Three Teflon sample chamber fillers are used to fill the chamber with diameters of 4, 3, 2, and 1.25 inches;
Wafer sample racks with diameters of 4, 3, and 2 inches and square crystal sample racks with a side length of 10 mm are compatible with HF;