High temperature phosphoric acid concentration meter

HORIBA/Horiba CS-620F Fiber Optic TypeHigh temperature phosphoric acid concentration meterProduct Details

In the 3D NAND process, dozens of layers of silicon dioxide and silicon nitride are deposited, and the silicon nitride layer is selectively etched using high-temperature phosphoric acid. In this process, the desired etching rate can be achieved by controlling the concentration and temperature of the chemical solution. Mature models are difficult to measure high-temperature chemical solutions, but CS-620F can measure at temperatures as high as 170 ℃. Continuous measurement using absorption spectroscopy requires less maintenance and consumables compared to other methods.

Product features

It can measure up to 92% high concentration phosphoric acid.

●No cooling mechanism or cooling time is required.

●High temperature phosphoric acid (140 to 170 ℃) in the circulation pipeline can be directly measured without the need for cooling.

●The sample is in contact with PFA to reduce the risk of contamination.

●Adopting a background correction cycle every six months can significantly reduce machine downtime.

●Updating measurement data every 3 seconds helps to control concentration feedback more quickly.

stability

▶ The measurement result sample (actual drug solution) was measured for 1 hour and showed good stability.

▶ Measurement conditions

Measurement cycle: every 3 seconds Measurement time: 1 hour Moving average: 16 times.

Sample concentration (initial sample concentration) H3PO4: 92.2% H2O: 7.8% Sample temperature: 141 ° C.

HORIBA/Horiba CS-620F Fiber Optic TypeHigh temperature phosphoric acid concentration meterProduct Parameters:

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Fiber optic chemical concentration meter CS-600F

CS-600F provides more advanced features suitable for production, such as the ability to measure high-temperature chemical solutions online in various applications, stable operation that reduces downtime, and compact size that improves space productivity,To meet the accurate chemical concentration management required for excellent semiconductor wet process.

Smaller size, more flexible layout

The CS-600F concentration meter is compact in size, with a height reduction of 36% and a volume reduction of 40% compared to mature models (CS-100F1 series). The required space for sample unit fiber optic cables is reduced by 46%. The light source unit and concentration meter host can be remotely installed separately, supporting flexible installation according to the location of the chemical solution unit and cleaning equipment.

High stability online measurement of high-temperature chemical solutions (20 to 80 ℃)

The new optical system and improved processing algorithm support online measurement of high-temperature chemical solutions, which is a key step in excellent wet process technology. This eliminates the need for cooling chemical samples. HORIBA's CS-600F has high stability,More effective and accurate management of chemical solutions has been achieved.

The frequency of background correction has significantly decreased

Compared with mature models (CS-100F1 series), the regular calibration frequency is significantly reduced, which in turn significantly reduces machine downtime and helps improve production.

A single concentration meter can measure up to six types of chemical solutions (types or concentration ranges)

A single concentration meter can measure up to six types of chemical solutions (types or concentration ranges). You can freely specify the type and concentration range of the medication, and CS-600F ensures that it meets various testing requirements.

Can output measurement values of up to six components (serial output)

The mature model (CS-100F1 series) can output measurement values of four components (serial output). The new CS-600F model can output measurement values of up to six components in a serial output manner.The CS-600F model simulates four components, while the CS-100F1 model has two.

Product Parameters: