Semiconductor integrated circuit testing 100fA probe station

In experiments such as semiconductor and nanoelectronic device characterization, transistor on state current measurement, high resistance material resistivity measurement, electrical properties of nanodevices, scanning probe microscopy, etc., when the device size is reduced to the nanometer level or the material is very thin, the leakage current and the measured current themselves are extremely small. At this level, the experimenter needs to use a probe station with a current less than 100fA to combat various noises and interferences, including thermal noise, Johnson noise, vibration noise, and even charges generated by molecular ionization in the air.