In recent years, uncooled infrared focal plane detectors have received attention due to their performance. With its widespread application, the requirements for the performance of uncooled infrared focal plane detectors in various fields are constantly increasing. Under the stimulation of external demand, uncooled infrared detectors have undergone countless improvements and performance enhancements from their birth decades ago to their widespread application today. At the same time, the low-cost requirement for detector research has made the packaging cost of detectors a necessary factor to consider. So, pre packaging chip selection testing has become a research hotspot. This article is based on this hot topic, and after analyzing the domestic and international development and research trends of uncooled infrared focal plane detector testing technology, a set of automatic testing schemes for infrared detectors based on vacuum probe stations is proposed. This automatic testing system can test various parameters of uncooled infrared detector chips and complete the chip response rate test under high vacuum conditions, thereby evaluating the performance of the chip and providing a selection basis for the packaging of uncooled infrared detector chips. The main research content of this paper includes three aspects.

(1) Design of hardware testing circuit: This section mainly provides driving voltage and timing excitation for chip testing, while completing the acquisition and processing of pixel response voltage signals. At the same time, a single ended to differential network is designed in the data acquisition section to eliminate common mode noise and enhance the driving capability of analog voltage signals.

(2) Design of vacuum probe station probe card: For different arrays of detector chips, corresponding test probe cards are designed in this article. At the same time, the bias voltage generation circuit is directly integrated into the test probe card, and the bias voltage can be directly biased to the chip through the probe to avoid interference during analog signal transmission.

(3) Implementation of automatic control for testing system: This design is based on VC++development platform, and controls the vacuum probe station and FPGA based testing circuit module through RS232 protocol. Matlab is used to complete the processing and analysis of test data, ultimately achieving automatic chip selection testing for 320 × 240 and 384 × 288 series chips. This automatic testing system realizes the automatic testing of uncooled infrared detector chip wafers and single chips. The overall performance of the tested chip is evaluated through the test results of related parameters such as response rate and noise, and the test results are displayed in the form of test reports and wafermap. This test result serves as an important basis for chip selection before packaging, greatly reducing the testing time and packaging cost of infrared detectors.