Four target magnetron sputtering coating instrument

Compared to ordinary plasma sputtering, magnetron sputtering has the advantages of high energy and speed, high coating rate, and low sample temperature rise, making it a typical high-speed low-temperature sputtering. The magnetic control target is equipped with a water-cooled interlayer, and the water-cooled machine can effectively remove heat, avoiding heat accumulation on the target surface and enabling the magnetic control coating to work stably for a long time