spectroscopic ellipsometerIt is a high-precision optical measuring instrument mainly used to analyze the optical properties of materials (such as refractive index, extinction coefficient), film thickness (from nanometer to micrometer level), and microstructure information of surfaces/interfaces. The core principle is to utilize the changes in the polarization state of light reflected or transmitted on the surface of materials, and to infer the physical properties of materials by analyzing these changes. It is widely used in fields such as semiconductors, optical thin films, nanomaterials, biomedical sciences, etc.
The device can be operated without contact, without non-destructive measurement, and without damaging the sample; Thickness measurement can reach sub nanometer level; No need for labeling or preprocessing, suitable for a variety of materials.
selectspectroscopic ellipsometerYou can pay attention to the following points:
1. Spectral range: Select the appropriate spectral range based on the optical properties of the measured material. For example, transparent materials need to focus on the refractive index spectral region, while short wave absorbing materials can be extended to the infrared transparent region to determine thickness.
2. Measurement accuracy and repeatability: Accuracy is the core indicator and needs to be verified through standard samples (such as air); Repeatability reflects the stability of the instrument and requires multiple measurements to compare the results.
3. Incident angle method: Multi angle measurement can improve reliability, but not all scenarios require it. Complex structures such as multilayer films and absorption films require multi angle measurements, while simple thin films can be measured at a single angle.
4. Analysis software: Ellipsometer measurement is a non direct measurement, and data needs to be fitted and analyzed. The software should have a rich material database, flexible model construction capabilities, and efficient algorithms to support fast and accurate parameter inversion.
5. Hardware configuration: Select hardware such as rotary compensator, automatic angle changing base, and converging beam technology according to requirements.