Industry challenges

The consistency of ultrapure water (UPW) production is crucial for microelectronic manufacturing and helps protect product quality. In addition to basic ultrapure water monitoring, microelectronics factories also face challenges in quickly responding to deviations from trends and conducting effective troubleshooting and process control. Other areas of concern include ensuring chemical purity to improve process performance and mass production, as well as monitoring wastewater and reuse water.

Microelectronics manufacturers encounter various organic pollutants and face various challenges in production, including:

　　●Low ppm concentration in water supply and high-purity process chemicals

　　●PPT level concentration before final polishing

　　●Complex sample matrices in reuse and wastewater applications

　　●Key requirements for monitoring harmful particles such as silicone gel

　　Solution

With the Sievers Total Organic Carbon (TOC) analyzer and Ultra Pure Water (UPW) boron analyzer, Veolia is able to provide analytical solutions suitable for every step of microelectronic manufacturing processes. Given its broad analytical scope and versatility, the Sievers TOC analyzer can be used for monitoring ultrapure water, process chemical purity, recycled water, and wastewater treatment. Due to boron leaking out of the resin bed before silicon dioxide, the Sievers ultrapure water boron analyzer can control silicon dioxide and manage the resin bed by detecting an increase in boron concentration.

　　Comprehensive and flexible monitoring options

There are two commonly used detection techniques for monitoring TOC in low concentration microelectronic applications: membrane conductivity and direct conductivity. Sievers' products cover both technologies, and also offer wet chemical oxidation methods suitable for more complex substrates such as process chemicals and wastewater.

We can provide the following instruments and products:

　　●Sievers M9e, M500e, and 500 RLe TOC analyzers use Sievers membrane conductivity detection technology

Sievers membrane conductivity technology eliminates false positives and false negatives caused by halogenated organic compounds and amines present in most ultrapure water systems

　　●Sievers CheckPointe TOC sensor uses direct conductivity detection technology

　　 ◆Provides an economical option suitable for non critical ultrapure water monitoring points

　　 ◆Tools for rapid diagnosis and troubleshooting

　　●The Sievers InnovOx TOC analyzer uses non dispersive infrared (NDIR) detection and supercritical water oxidation (SCWO) technology

　　 ◆Can accurately and reliably detect trace organic compounds in concentrated acids, bases, and pure chemicals

　　 ◆Can monitor wastewater and up to 30% brine

　Application requirements and Sievers' solutions

　　Monitoring of water supply, ultrapure water, and recycled water systems

The Sievers M9e online and portable TOC analyzer is designed specifically for the most complex water systems and applications. The analysis range of this analyzer is 0.03 ppb to 50 ppm, using membrane conductivity technology to accurately detect the TOC concentration in the system feedwater, reverse osmosis effluent, and final effluent. Using the optional Turbo mode, the SieversM9e analyzer is an ideal troubleshooting tool for reuse water detection with only 4 seconds of analysis time.

The Sievers M9e can achieve:

　　●Matching between instruments

　　●Stability of low concentration detection in low TOC ultrapure water applications

　　●Automated operations such as calibration, validation, and data analysis

　　●12-month calibration stability period

　　●Advanced auto zero function, suitable for ultra pure level accuracy and precision

　Chemical and wastewater purity

In order to achieve process performance and optimize mass production, controlling TOC is crucial in process chemicals such as hydrogen peroxide, sodium hydroxide, ammonium hydroxide, sulfuric acid, and other etching/electroplating chemicals. The Sievers InnovOx TOC analyzer is highly suitable for such monitoring as well as organic matter monitoring in wastewater and reuse water.

Sievers InnovOx helps:

The factory makes wiser compliance and handling decisions

　　●Can provide real-time direct carbon detection, in sharp contrast to indirect oxygen demand detection

　　●Using Supercritical Water Oxidation (SCWO) technology to treat complex matrices

Summary of Sievers analyzer and its application in microelectronics manufacturing

　　References

1.Godec,Richard D.,“Monitoring and Controlling UPW Organic Nitrogen Contamination to Improve Immersion Photolithography Process Control.”Presented at ULTRAPURE WATER Confer-ence,Portland,OR,November 2011,Tall Oaks Publishing,Inc.

2.Godec,Richard D.,”The Performance Comparison of Ultrapure Water TOC Analyzers using an Automated Standard Addition Apparatus. ”Published and copyrighted by Semiconductor Pure Water and Chemical Conference,2000 Proceedings.

3.Dunn R.,“New Analytical Technique Promotes Elimination of Silica in Feed,Steam and Condensate Systems.”